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Journal of the Optical Society of America

Journal of the Optical Society of America

  • Vol. 61, Iss. 12 — Dec. 1, 1971
  • pp: 1630–1639

Reflection of Light by a System of Nonabsorbing Isotropic Film-Nonabsorbing Isotropic Substrate with Randomly Rough Boundaries

I. OHLÍDAL, K. NAVRÁTIL, and F. LUKEŠ  »View Author Affiliations

JOSA, Vol. 61, Issue 12, pp. 1630-1639 (1971)

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The reflection of light by a system consisting of a nonabsorbing isotropic film and nonabsorbing isotropic substrate with both boundaries (air-film and film-substrate) rough is considered. The scalar theory of light scattering on such a system has been developed. The formulas characterizing both the coherent and the incoherent components of the reflected-light flux have been derived for the case of the identical film (both boundaries are rough, the air-film boundary is a copy of the film- substrate boundary) as well as for the general film (both boundaries are rough and different). The numerical results of the calculation performed for a system of SiO2-Si are presented and the experimental results for the case of art identical film of SiO2 on a Si single crystal are given. The agreement between the theory and the experiment is fairly good. The correctness of the film thickness and its index of refraction depends to a fairly high degree on the roughness of the air-film and film-substrate boundaries.

I. OHLÍDAL, K. NAVRÁTIL, and F. LUKEŠ, "Reflection of Light by a System of Nonabsorbing Isotropic Film-Nonabsorbing Isotropic Substrate with Randomly Rough Boundaries," J. Opt. Soc. Am. 61, 1630-1639 (1971)

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