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Journal of the Optical Society of America

Journal of the Optical Society of America

  • Vol. 61, Iss. 6 — Jun. 1, 1971
  • pp: 773–776

General Treatment of the Effect of Cell Windows in Ellipsometry

R. M. A. AZZAM and N. M. BASHARA  »View Author Affiliations


JOSA, Vol. 61, Issue 6, pp. 773-776 (1971)
http://dx.doi.org/10.1364/JOSA.61.000773


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Abstract

A general analysis of the effect of cell windows shows more error terms in each of the four ellipsometry zones than is found in the conventional small-retardation wave-plate approximation. The value of ψ from a two-zone average requires a correction that is generally dependent on both the window and the reflecting surface under study. A difference of the flux transmission in the s direction from that in the p direction as small as 10-6 leads to an appreciable correction ~0.06°. An experimental procedure to correct for window error is described and is applied to three different types of windows with Δ errors from 0.05° to 1.5°.

Citation
R. M. A. AZZAM and N. M. BASHARA, "General Treatment of the Effect of Cell Windows in Ellipsometry," J. Opt. Soc. Am. 61, 773-776 (1971)
http://www.opticsinfobase.org/josa/abstract.cfm?URI=josa-61-6-773

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