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Ellipsometric Measurement of the Polarization Transfer Function of an Optical System

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Abstract

Conventional ellipsometry is extended to determine the polarization transfer function of any optical system. Only three null measurements are needed to determine the three complex parameters that define the transfer function. More measurements can be taken to overdetermine the unknown parameters, to reduce the effect of the various sources of error in the ellipsometer. The conditons for compensation (the existence of a null) are defined. A system composed of a retardation plate and a mirror is measured to demonstrate the various aspects of the theory and to illustrate the application of the method. This technique makes it possible to characterize surfaces that exhibit anomalous cross-scattering effects.

© 1972 Optical Society of America

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