The scattering efficiencies of embossed dielectric gratings, with grating period ^ shorter than the wavelength λ of the scattered light (^ ∾ 0.6λ), were measured and compared with theory. The experimental and theoretical results were found to be in very good agreement.
W. J. Tomlinson and H. P. Weber, "Scattering efficiency of high-periodicity dielectric gratings: Experiment," J. Opt. Soc. Am. 63, 685-688 (1973)