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Journal of the Optical Society of America

Journal of the Optical Society of America

  • Vol. 64, Iss. 4 — Apr. 1, 1974
  • pp: 429–433

Thickness of absorbing films necessary to measure their optical constants using the reflectance-vs-angle-of-incidence method

W. R. Hunter and G. Hass  »View Author Affiliations


JOSA, Vol. 64, Issue 4, pp. 429-433 (1974)
http://dx.doi.org/10.1364/JOSA.64.000429


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Abstract

In the vacuum-ultraviolet region of the spectrum, the optical constants of vacuum-deposited absorbing films can be determined by measuring their specular reflectances at a number of angles of incidence. These reflectance values are then used to solve the generalized Fresnel reflection equations to obtain n and k. If the film is thin enough so that interference occurs between the wave fronts reflected from the film-vacuum and film-substrate interfaces, the errors in determining n and k may be large. Previously an opaque film, one that would transmit only 0.1% of the incident radiant flux at normal incidence if it were free-standing, was considered necessary if the n, k values of the film were to be determined with an accuracy of 1%. This paper presents the results of calculations demonstrating that the film thickness necessary to reduce the errors in n and k to 1% is dependent on n and k and is generally less than the opaque thickness.

Citation
W. R. Hunter and G. Hass, "Thickness of absorbing films necessary to measure their optical constants using the reflectance-vs-angle-of-incidence method," J. Opt. Soc. Am. 64, 429-433 (1974)
http://www.opticsinfobase.org/josa/abstract.cfm?URI=josa-64-4-429

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