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Journal of the Optical Society of America

Journal of the Optical Society of America

  • Vol. 66, Iss. 11 — Nov. 1, 1976
  • pp: 1210–1217

Real-time measurement of surface roughness by correlation of speckle patterns

D. Léger and J. C. Perrin  »View Author Affiliations


JOSA, Vol. 66, Issue 11, pp. 1210-1217 (1976)
http://dx.doi.org/10.1364/JOSA.66.001210


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Abstract

In a previous article we have shown that the two speckle patterns produced from the same rough surface illuminated by two coherent plane waves under two different angles of incidence are correlated. The correlation depends on the surface roughness. In this paper a method is described where the rough surface is illuminated simultaneously by the two plane waves. The ensemble-averaged coherence function, that is, the correlation function, of the scattered field is measured by using a two-waves interferometer. This affords a realtime measurement of the surface roughness in the range of large roughness (σ > λ). The theoretical calculations have been performed for a normally distributed surface. The experimental results are in good agreement with theory. We describe the optical arrangement of an instrument based on this principle.

© 1976 Optical Society of America

Citation
D. Léger and J. C. Perrin, "Real-time measurement of surface roughness by correlation of speckle patterns," J. Opt. Soc. Am. 66, 1210-1217 (1976)
http://www.opticsinfobase.org/josa/abstract.cfm?URI=josa-66-11-1210


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References

  1. J. M. Burch and J. M. J. Tokarski, "Production of multiple beam fringes from photographic scatterers," Opt. Acta 15, 101–111 (1968).
  2. G. Tribillon, "Correlation entre deux speckles obtenus avec deux longueurs d'onde. Application à la mesure de la rugositè moyenné," Opt. Commun. 11, 172–174 (1974).
  3. J. A. Mendez and M. L. Roblin, "Utilisation des franges d'intérference en lumière diffuse pour l'étude de l'état de surface d'un diffuseur," Opt. Commun. 13, 142–147 (1975).
  4. D. Léger, E. Mathieu, and J. C. Perrin, "Optical surface roughness determination using speckle correlation technique," Appl. Opt. 14, 872–877 (1975).
  5. J. N. Butters, "Electronic speckle pattern interferometry," in Proceedings of Symposium on the Engineering Uses of Coherent Optics, Glasgow (Scotland), April 1975, p. 403–411.
  6. P. Beckmann and A. Spizzichino, "The Scattering of Electromagnetic Waves from Rough Surfaces" (Pergamon, New York, 1963).
  7. K. Nagata, N. Yoshida, and J. Nishiwaki, "Ensemble-averaged coherence function of light reflected from rough surface. Determination of its correlation length," Jpn. J. Appl. Phys. 9, 505–515 (1970).
  8. J. W. Goodman, "Some effects of target-induced scintillation on optical radar performance," Proc. IEEE 53, 1688–1700 (1965).
  9. D. Léger, "Deux méthodes de mesure de rugosité par corrélation de speckle," Thesis, University of Orsay, France (1976).

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