Small nonlinearity (~2%) of the light-flux detection system is shown to have appreciable effects on the accuracy of calibration and data analysis in rotating-analyzer ellipsometers. Procedures for detecting and correcting these effects are presented.
© 1976 Optical Society of America
William Ralph Hunter, "Effects of detector nonlinearity on calibration and data reduction of rotating-analyzer ellipsometers," J. Opt. Soc. Am. 66, 94-97 (1976)