OSA's Digital Library

Journal of the Optical Society of America

Journal of the Optical Society of America

  • Vol. 66, Iss. 2 — Feb. 1, 1976
  • pp: 94–97

Effects of detector nonlinearity on calibration and data reduction of rotating-analyzer ellipsometers

William Ralph Hunter  »View Author Affiliations


JOSA, Vol. 66, Issue 2, pp. 94-97 (1976)
http://dx.doi.org/10.1364/JOSA.66.000094


View Full Text Article

Acrobat PDF (382 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Small nonlinearity (~2%) of the light-flux detection system is shown to have appreciable effects on the accuracy of calibration and data analysis in rotating-analyzer ellipsometers. Procedures for detecting and correcting these effects are presented.

© 1976 Optical Society of America

Citation
William Ralph Hunter, "Effects of detector nonlinearity on calibration and data reduction of rotating-analyzer ellipsometers," J. Opt. Soc. Am. 66, 94-97 (1976)
http://www.opticsinfobase.org/josa/abstract.cfm?URI=josa-66-2-94


Sort:  Author  |  Journal  |  Reset

References

  1. B. D. Cahan and R. F. Spanier, Surf. Sci. 16, 166 (1969).
  2. R. Greef, Rev. Sci. Instrum. 41, 532 (1970).
  3. P. S. Hauge and F. H. Dill, IBM J. Res. Dev. 17, 472 (1973).
  4. D. E. Aspnes, Opt. Commun. 8, 222 (1973).
  5. Y. J. van der Meulen and N. C. Hien, J. Opt. Soc. Am. 64, 804 (1974).
  6. D. E. Aspnes, J. Opt. Soc. Am. 64, 812 (1974).
  7. R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 64, 1459 (1974).
  8. R. H. Muller, Surf, Sci. 16, 14 (1969).
  9. Actually, the first, third, and fourth coefficients, which indicate errors, are also calculated.
  10. Previous measurements indicated that A0=0 was appropriate for this particular instrument, However, small changes of A0 (even with A2=0) can appreciably affect F.
  11. D. E. Aspnes, J. Opt. Soc. Am. 64, 639 (1974).
  12. W. G. Oldham, J. Opt. Soc. Am. 57, 57 (1967).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited