The rotating-compensator/analyzer fixed-analyzer ellipsometer configuration proposed and discussed here combines the advantages of unambiguous polarization-state determination and insensitivity to detector polarization response shown by rotating-compensator (rotating-analyzer) fixed-analyzer instruments, with the self-calibration features of rotating-compensator rotating-analyzer configurations. Because such generality is not necessary for all ellipsometric applications, we compare this system to other automatic ellipsometers and suggest preferred configurations for several representative uses.
© 1976 Optical Society of America
D. E. Aspnes and P. S. Hauge, "Rotating-compensator/analyzer fixed-analyzer ellipsometer: Analysis and comparison to other automatic ellipsometers," J. Opt. Soc. Am. 66, 949-954 (1976)