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Journal of the Optical Society of America

Journal of the Optical Society of America

  • Vol. 66, Iss. 9 — Sep. 1, 1976
  • pp: 949–954

Rotating-compensator/analyzer fixed-analyzer ellipsometer: Analysis and comparison to other automatic ellipsometers

D. E. Aspnes and P. S. Hauge  »View Author Affiliations


JOSA, Vol. 66, Issue 9, pp. 949-954 (1976)
http://dx.doi.org/10.1364/JOSA.66.000949


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Abstract

The rotating-compensator/analyzer fixed-analyzer ellipsometer configuration proposed and discussed here combines the advantages of unambiguous polarization-state determination and insensitivity to detector polarization response shown by rotating-compensator (rotating-analyzer) fixed-analyzer instruments, with the self-calibration features of rotating-compensator rotating-analyzer configurations. Because such generality is not necessary for all ellipsometric applications, we compare this system to other automatic ellipsometers and suggest preferred configurations for several representative uses.

© 1976 Optical Society of America

Citation
D. E. Aspnes and P. S. Hauge, "Rotating-compensator/analyzer fixed-analyzer ellipsometer: Analysis and comparison to other automatic ellipsometers," J. Opt. Soc. Am. 66, 949-954 (1976)
http://www.opticsinfobase.org/josa/abstract.cfm?URI=josa-66-9-949

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