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Journal of the Optical Society of America

Journal of the Optical Society of America

  • Vol. 67, Iss. 3 — Mar. 1, 1977
  • pp: 399–406

The membrane mirror as an adaptive optical element

Ronald P. Grosso and Martin Yellin  »View Author Affiliations


JOSA, Vol. 67, Issue 3, pp. 399-406 (1977)
http://dx.doi.org/10.1364/JOSA.67.000399


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Abstract

A membrane mirror assembly is described that has a membrane deflected by a region of electrostatic actuators, consisting of conducting pads. The procedure for fabrication of typical membranes is described and involves evaporation of the material onto a substrate in a vacuum chamber. Parametric equations, developed from basic vibration theory, are given for establishing transient and steady-state performance criteria. Experimental data, using both titanium and nickel test membranes, shows that the performance satisfies the predicted requirements.

© 1977 Optical Society of America

Citation
Ronald P. Grosso and Martin Yellin, "The membrane mirror as an adaptive optical element," J. Opt. Soc. Am. 67, 399-406 (1977)
http://www.opticsinfobase.org/josa/abstract.cfm?URI=josa-67-3-399

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