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Journal of the Optical Society of America

Journal of the Optical Society of America

  • Vol. 69, Iss. 2 — Feb. 1, 1979
  • pp: 357–366

Quantitative surface topography determination by Nomarski reflection microscopy. I. Theory

Delbert L. Lessor, John S. Hartman, and Richard L. Gordon  »View Author Affiliations


JOSA, Vol. 69, Issue 2, pp. 357-366 (1979)
http://dx.doi.org/10.1364/JOSA.69.000357


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Abstract

The Nomarksi differential interference contrast microscope is examined as a tool for determination of metallic mirror surface topography. This discussion includes the development of an optical model for the Nomarski system, an examination of the key results of the model's application to sloped sample surfaces, and recommended procedures for implementation. The functional relationship is developed between image intensity and the component of surface slope along the Nomarski shear direction, the fixed parameters in the Nimarksi system, and the adjustable phase shifts related to Nomarski prism position. Equations are also developed to allow the determination of surface slope from relative image intensity when sample reflectively is uniform and slopes are small.

© 1979 Optical Society of America

Citation
Delbert L. Lessor, John S. Hartman, and Richard L. Gordon, "Quantitative surface topography determination by Nomarski reflection microscopy. I. Theory," J. Opt. Soc. Am. 69, 357-366 (1979)
http://www.opticsinfobase.org/josa/abstract.cfm?URI=josa-69-2-357


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References

  1. H. E. Bennett and J. O. Porteus, "Relation between surface roughness and specular reflectance at normal incidence," J. Opt. Soc. Am. 51, 123–129 (1961).
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  7. J. Demarq and J. Rosch, in Advanced Optical Techniques, edited by A.C.S. Van Heel (North Holland, Amsterdam, The Netherlands, 1967), 393.
  8. U. Bertocci and T. S. Noggle, "Interference contrast employed to measure slopes on metallographic specimens," Rev. Sci. Instum. 37, 1750–1751 (1966).
  9. Max Born and Emil Wolf, Principles of Optics (Pergamon, Oxford, 1970), 4th ed., Chap. 14.
  10. Georg Hass, in American Institute of Physics Handbook, edited by Dwight E. Gray (McGraw Hill, New York, 1957), Chap. 6, Table 6k, pp. 6–104.

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