The complex ordinary (No) and extraordinary (Ne) refractive indices of an absorbing uniaxial crystal can be determined using reflection ellipsometry. The measurements are taken with the optic axis parallel and perpendicular to the crystal’s surface. The equations obtained are solved without resort to iterative methods; No and Ne are determined separately. Sixteen solution sets (No, Ne) are obtained and the correct solution can be easily identified. We present an optimum angle of incidence that minimizes the relative errors in No and Ne.
© 1980 Optical Society of America
M. Elshazly-Zaghloul and R. M. A. Azzam, "Inversion of the nonlinear equations of reflection ellipsometry for uniaxial crystals in symmetrical orientations," J. Opt. Soc. Am. 70, 880-883 (1980)