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Journal of the Optical Society of America

Journal of the Optical Society of America

  • Vol. 71, Iss. 9 — Sep. 1, 1981
  • pp: 1115–1123

Scattering from multilayer thin films: theory and experiment

P. Bousquet, F. Flory, and P. Roche  »View Author Affiliations


JOSA, Vol. 71, Issue 9, pp. 1115-1123 (1981)
http://dx.doi.org/10.1364/JOSA.71.001115


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Abstract

A theoretical method is described for calculating the angular scattering curve for any given thin-film multilayer in which the various surfaces and interfaces are assumed to be rough. The energy that is scattered in any particular direction depends on two factors. The first is solely a function of the characteristics of the ideal multilayer and the observation conditions. The second depends on the roughnesses of the various surfaces, that is, on their autocorrelation and cross-correlation functions. The expressions that are obtained are completely general because no restrictive hypothesis has been developed on the relationship that may exist between the roughnesses of the various interfaces. The principal features of the apparatus used for the scattering measurements are briefly described. Next, several results of calculation and measurement are given as illustrations. The measurements show that polished surfaces of high optical quality often show marked anisotropy.

© 1981 Optical Society of America

Citation
P. Bousquet, F. Flory, and P. Roche, "Scattering from multilayer thin films: theory and experiment," J. Opt. Soc. Am. 71, 1115-1123 (1981)
http://www.opticsinfobase.org/josa/abstract.cfm?URI=josa-71-9-1115


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References

  1. J. M. Elson and J. M. Bennett, "Relation between the angular dependence of scattering and the statistical properties of optical surfaces," J. Opt. Soc. Am. 69, 31–47 (1979).
  2. E. Körger and E. Kretschmann, "Scattering of light by slightly rough surfaces on thin films including plasma resonance emission," Z. Phys. 237, 1–15 (1970).
  3. J. M. Elson, "Infrared light scattering from surfaces covered with multiple dielectric overlayers," Appl. Opt. 16, 2872–2882 (1977).
  4. S. J. Gourley and P. H. Lissberger, "Optical scattering in multilayer thin films," Opt. Acta 26, 117–143 (1979).
  5. J. M. Eastman, "Surface scattering in optical interference coatings," Ph.D. Thesis (University of Rochester, Rochester, New York, 1974) (unpublished).
  6. C. K. Carniglia, "Scalar scattering theory for multilayer optical coatings," Opt. Eng. 18, 104–115 (1979).
  7. J. M. Elson, J. P. Rahn, and J. M. Bennett, "Light scattering from multilayer optics: comparison of theory and experiment," Appl. Opt. 19, 669–679 (1980); J. M. Elson, "Angle-resolved light scattering from composite optical surfaces," Proc. Soc. Photo-Opt. Instrum. Eng. 240, 296–305 (1980). M. L. Scott and J. M. Elson, "Multilayer light scattering and the laser gyro," Appl. Phys. Lett. 32, 158–161 (1978); J. M. Elson, "Diffraction and diffuse scattering from dielectric multilayers," J. Opt. Soc. Am. 69, 48–54 (1979).
  8. P. H. Berning, "Theory and calculations of optical thin films," in Physics of Thin Films, G. Hass, ed. (Academic, New York, 1963), Vol. 1, pp. 69–121.
  9. F. E. Nicodemus, "Directional reflectance and emissivity of an opaque surface," Appl. Opt. 4, 767–773 (1965); P. Baumeister, "Reflectance and transmission measurements," Proc. Soc. Photo-Opt. Instrum. Eng. 50, 37–67 (1974).
  10. E. Kretschmann and E. Kröger, "Reflection and transmission of light by a rough surface, including results for surface-plasmon effects," J. Opt. Soc. Am. 65,150–154 (1975); P. Croce, "Sur l'effet des couches très minces et des rugosités sur la reflexion, la transmission et la diffusion de la lumière par un dioptre," J. Opt. (Paris) 8, 127–139 (1977).
  11. J. M. Bennett, "Measurement of the rms roughness, autocovariance function and other statistical properties of optical surfaces using a FECO scanning interferometer," Appl. Opt. 11, 2705–2721 (1976); J. Eastman and P. Baumeister, "The microstructure of polished optical surfaces," Opt. Commun. 12, 418–420 (1974).
  12. P. Giacomo, "Les couches réflechissantes multidiélectriques appliquées à l'interférométrie de Fabry–Perot. Etude théorique et expérimentale des couches réelles," Rev. Opt. Theor. Instrum. 35, 317–354, 442–467 (1956).

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