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Journal of the Optical Society of America A

Journal of the Optical Society of America A


  • Vol. 15, Iss. 3 — Mar. 1, 1998
  • pp: 622–624

Resolution for off-axis illumination

Colin J. R. Sheppard and Zoltan Hegedus  »View Author Affiliations

JOSA A, Vol. 15, Issue 3, pp. 622-624 (1998)

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The fundamental limit to resolution of a perfect lens for off-axis object points is considered. It has been shown previously that resolution decreases with illumination. Here it is shown that the relative decrease in resolution with illumination angle is reduced for lenses of higher numerical aperture. These results are of importance for optical systems that combine high aperture with large field of view, such as lithographic lenses.

© 1998 Optical Society of America

OCIS Codes
(050.1940) Diffraction and gratings : Diffraction
(120.4570) Instrumentation, measurement, and metrology : Optical design of instruments
(220.2560) Optical design and fabrication : Propagating methods

Original Manuscript: June 6, 1997
Revised Manuscript: August 28, 1997
Manuscript Accepted: September 15, 1997
Published: March 1, 1998

Colin J. R. Sheppard and Zoltan Hegedus, "Resolution for off-axis illumination," J. Opt. Soc. Am. A 15, 622-624 (1998)

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  1. M. V. R. K. Murty, “On the theoretical limit of resolution,” J. Opt. Soc. Am. 47, 667–668 (1957). [CrossRef]
  2. V. A. Zverev, “Illumination distribution in the diffraction image of an off-axis point,” Sov. J. Opt. Technol. 53, 451–454 (1986).
  3. J. J. Stamnes, Waves in Focal Regions (Hilger, Bristol, 1986).
  4. M. Born, E. Wolf, Principles of Optics, 6th ed. (Pergamon, Oxford, 1983).
  5. H. H. Hopkins, “The Airy disc formula for systems of high relative aperture,” Proc. Phys. Soc. London 55, 116–128 (1943). [CrossRef]
  6. B. Richards, E. Wolf, “Electromagnetic diffraction in optical systems. II. Structure of the image field in an aplanatic system,” Proc. R. Soc. London, Ser. A 253, 358–379 (1959). [CrossRef]
  7. Y. Li, E. Wolf, “Three-dimensional intensity distribution near the focus in systems of different Fresnel numbers,” J. Opt. Soc. Am. A 1, 801–808 (1984). [CrossRef]
  8. W. Hsu, R. Barakat, “Stratton–Chu vectorial diffraction of electromagnetic fields by apertures with application to small-Fresnel-number systems,” J. Opt. Soc. Am. A 11, 623–629 (1994). [CrossRef]
  9. C. J. R. Sheppard, “Imaging in optical systems of finite Fresnel number,” J. Opt. Soc. Am. A 3, 1428–1432 (1986). [CrossRef]
  10. S. F. Gibson, F. Lanni, “Diffraction by a circular aperture as a model for three-dimensional optical microscopy,” J. Opt. Soc. Am. A 6, 1357–1367 (1989). [CrossRef] [PubMed]
  11. C. J. R. Sheppard, P. P. Roberts, M. Gu, “Fresnel approximation for off-axis illumination of a circular aperture,” J. Opt. Soc. Am. A 10, 984–986 (1993). [CrossRef]
  12. C. J. R. Sheppard, M. Hrynevych, “Diffraction by a circular aperture: a generalization of Fresnel diffraction theory,” J. Opt. Soc. Am. A 9, 274–281 (1992). [CrossRef]
  13. R. Kingslake, Optical System Design (Academic, Orlando, Fla., 1983).

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