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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 15, Iss. 8 — Aug. 1, 1998
  • pp: 2233–2241

Suppression of phase errors from vibration in phase-shifting interferometry

J. M. Huntley  »View Author Affiliations


JOSA A, Vol. 15, Issue 8, pp. 2233-2241 (1998)
http://dx.doi.org/10.1364/JOSAA.15.002233


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Abstract

A method of postprocessing the data from a phase-shifting interferometer is proposed that reduces the influence of vibration or other environmental disturbances occurring during the data-acquisition time. The method is based on spectral analysis of the time-varying intensity data from each of the camera pixels. A correction term is obtained at a frequency three times that of the phase-shifting device. No additional hardware is required, although the phase-shifting algorithm used must have phase steps of π/3. Numerical studies have demonstrated reductions in the rms phase error of more than one and two orders of magnitude for vibration amplitudes of 0.1 and 0.01 rad, respectively, with a commonly used seven-frame algorithm. The influence of factors affecting the technique’s performance—in particular, miscalibration of the phase-shifting device, nonlinearity of the photodetector, and finite integration time—is also investigated.

© 1998 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

History
Original Manuscript: October 20, 1997
Revised Manuscript: March 31, 1998
Manuscript Accepted: February 12, 1998
Published: August 1, 1998

Citation
J. M. Huntley, "Suppression of phase errors from vibration in phase-shifting interferometry," J. Opt. Soc. Am. A 15, 2233-2241 (1998)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-15-8-2233

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