Light scattering from slightly rough dielectric films
JOSA A, Vol. 16, Issue 2, pp. 331-338 (1999)
http://dx.doi.org/10.1364/JOSAA.16.000331
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Abstract
It is shown that the long-scale (smooth) component of the roughness spectrum of a slightly rough dielectric layer critically affects the angular distribution of radiation scattered from the surface. The interference pattern obtained from a sample with only small-scale roughness differs drastically from a sample with the same small-scale roughness but possessing slight (of the order λ/10) variation of the thickness of the dielectric layer. It is shown that when interference phenomena are significant and the dielectric film has long-scale roughness, conventional perturbation theory is invalid, even if the rms of roughness is much smaller than the wavelength. A model is presented that correctly predicts the measured angular intensity distributions in the scattered-light field for samples that possess arbitrary scales of roughness.
© 1999 Optical Society of America
[Optical Society of America ]
OCIS Codes
(240.0240) Optics at surfaces : Optics at surfaces
(240.0310) Optics at surfaces : Thin films
(240.5770) Optics at surfaces : Roughness
(260.3160) Physical optics : Interference
(290.0290) Scattering : Scattering
(290.5880) Scattering : Scattering, rough surfaces
Citation
Yu. S. Kaganovskii, V. D. Freilikher, E. Kanzieper, Y. Nafcha, M. Rosenbluh, and I. M. Fuks, "Light scattering from slightly rough dielectric films," J. Opt. Soc. Am. A 16, 331-338 (1999)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-16-2-331
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