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Journal of the Optical Society of America A

Journal of the Optical Society of America A


  • Vol. 20, Iss. 8 — Aug. 1, 2003
  • pp: 1576–1581

Modified Fresnel zone plates that produce sharp Gaussian focal spots

Qing Cao and Jürgen Jahns  »View Author Affiliations

JOSA A, Vol. 20, Issue 8, pp. 1576-1581 (2003)

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A modified Fresnel zone plate that can produce an approximate Gaussian focal spot is proposed for the focusing and imaging of soft x rays and extreme ultraviolet radiation. The selection conditions for the positions and the widths of the concentric open rings are analytically presented. The focal spot size can be much smaller than the width of the narrowest open ring, and the sidelobes and the higher orders can be effectively suppressed. Through numerical experiments, we confirm that a Gaussian focal spot with a beam width of 7.7 nm can be produced by a modified Fresnel zone plate with a minimum structure size of 30 nm.

© 2003 Optical Society of America

OCIS Codes
(050.1940) Diffraction and gratings : Diffraction
(050.1970) Diffraction and gratings : Diffractive optics
(110.0110) Imaging systems : Imaging systems
(220.2560) Optical design and fabrication : Propagating methods
(260.7200) Physical optics : Ultraviolet, extreme
(340.7440) X-ray optics : X-ray imaging

Original Manuscript: January 14, 2003
Revised Manuscript: April 9, 2003
Manuscript Accepted: April 9, 2003
Published: August 1, 2003

Qing Cao and Jürgen Jahns, "Modified Fresnel zone plates that produce sharp Gaussian focal spots," J. Opt. Soc. Am. A 20, 1576-1581 (2003)

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