Abstract

The Talbot effect of a grating with different kinds of flaws is analyzed with the finite-difference time-domain (FDTD) method. The FDTD method can show the exact near-field distribution of different flaws in a high-density grating, which is impossible to obtain with the conventional Fourier transform method. The numerical results indicate that if a grating is perfect, its Talbot imaging should also be perfect; if the grating is distorted, its Talbot imaging will also be distorted. Furthermore, we evaluate high-density gratings by detecting the near-field distribution with the scanning near-field optical microscopy technique. Experimental results are also given.

© 2005 Optical Society of America

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