OSA's Digital Library

Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 22, Iss. 9 — Sep. 1, 2005
  • pp: 1929–1936

Iterative algorithm for subaperture stitching interferometry for general surfaces

Shanyong Chen, Shengyi Li, and Yifan Dai  »View Author Affiliations


JOSA A, Vol. 22, Issue 9, pp. 1929-1936 (2005)
http://dx.doi.org/10.1364/JOSAA.22.001929


View Full Text Article

Acrobat PDF (188 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A novel iterative algorithm for subaperture stitching interferometry for general surfaces is presented. It is based on the alternating optimization technique and the successive linearization method. The computer-aided-design model of the tested surface is used to determine the overlapping region precisely. Subapertures are simultaneously stitched by minimizing deviations among them as well as deviations from the nominal surface. Precise prior knowledge of the six degrees-of-freedom nulling and alignment motion is no longer required.

© 2005 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(220.4840) Optical design and fabrication : Testing

Citation
Shanyong Chen, Shengyi Li, and Yifan Dai, "Iterative algorithm for subaperture stitching interferometry for general surfaces," J. Opt. Soc. Am. A 22, 1929-1936 (2005)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-22-9-1929


Sort:  Author  |  Year  |  Journal  |  Reset

References

  1. C. Kim and J. Wyant, "Subaperture test of a large flat or a fast aspheric surface," J. Opt. Soc. Am. 71, 1587 (1981).
  2. J. G. Thunen and O. Y. Kwon, "Full aperture testing with subaperture test optics," Proc. SPIE 351, 19-27 (1982).
  3. W. W. Chow and G. N. Lawrence, "Method for subaperture testing interferogram reduction," Opt. Lett. 8, 468-470 (1983).
  4. S. C. Jensen, W. W. Chow, and G. N. Lawrence, "Subaperture testing approaches: a comparison," Appl. Opt. 23, 740-745 (1984).
  5. T. W. Stuhlinger, "Subaperture optical testing: experimental verification," Proc. SPIE 656, 118-127 (1986).
  6. M. Y. Chen, W. M. Cheng, and C. W. Wang, "Multiaperture overlap-scanning technique for large-aperture test," Proc. SPIE 1553, 626-635 (1991).
  7. W. M. Cheng and M. Y. Chen, "Transformation and connection of subapertures in the multiaperture overlap-scanning technique for large optics tests," Opt. Eng. (Bellingham) 32, 1947-1950 (1993).
  8. W. M. Cheng, Y. L. Lin, and M. Y. Chen, "Accuracy analysis of multiaperture overlap-scanning technique (MAOST)," Proc. SPIE 2003, 283-288 (1993).
  9. M. Otsubo, K. Okada, and J. Tsujiuchi, "Measurement of large plane surface shape with interferometric aperture synthesis," Proc. SPIE 1720, 444-447 (1992).
  10. M. Otsubo, K. Okada, and J. Tsujiuchi, "Measurement of large plane surface shapes by connecting small-aperture interferograms," Opt. Eng. (Bellingham) 33, 608-613 (1994).
  11. M. Y. Chen and D. Z. Wu, "Multiaperture overlap-scanning technique for moire metrology," Proc. SPIE 2861, 107-112 (1996).
  12. M. Bray, "Stitching interferometer for large plano optics using a standard interferometer," Proc. SPIE 3134, 39-50 (1997).
  13. S. H. Tang, "Stitching: high-spatial-resolution microsurface measurements over large areas," Proc. SPIE 3479, 43-49 (1998).
  14. J. C. Wyant and J. Schmit, "Large field of view, high spatial resolution, surface measurements," Int. J. Mach. Tools Manuf. 38, 691-698 (1998).
  15. M. A. Schmucker and J. Schmit, "Selection process for sequentially combining multiple sets of overlapping surface profile interferometric data to produce a continuous composite map," U.S. patent 5,991,461 (November 23, 1999).
  16. M. Bray, "Stitching interferometer for large optics: recent developments of a system," Proc. SPIE 3492, 946-955 (1999).
  17. M. Bray, "Stitching interferometry and absolute surface shape metrology: similarities," Proc. SPIE 4501, 375-383 (2001).
  18. M. Sjöedahl and B. F. Oreb, "Stitching interferometric measurement data for inspection of large optical components," Opt. Eng. (Bellingham) 41, 403-408 (2002).
  19. L. Assoufid, M. Bray, J. Qian, and D. M. Shu, "3-D surface profile measurements of large x-ray synchrotron radiation mirrors using stitching interferometry," Proc. SPIE 4782, 21-28 (2002).
  20. Y. J. Yu and M. Y. Chen, "Correlative stitching interferometer and its key techniques," Proc. SPIE 4777, 382-393 (2002).
  21. M. Y. Chen, H. W. Guo, Y. J. Yu, and H. T. He, "Recent developments of multi-aperture overlap-scanning technique," Proc. SPIE 5180, 393-401 (2003).
  22. P. Murphy, G. Forbes, J. Fleig, P. Dumas, and M. Tricard, "Stitching interferometry: a flexible solution for surface metrology," Opt. Photonics News 14, May 2003, pp. 38-43.
  23. J. Fleig, P. Dumas, P. E. Murphy, and G. W. Forbes, "An automated subaperture stitching interferometer workstation for spherical and aspherical surfaces," Proc. SPIE 5188, 296-307 (2003).
  24. H. T. He, H. W. Guo, Y. J. Yu, and M. Y. Chen, "Novel connection method based on virtual cylinder for three-dimensional surface measurement," Acta Opt. Sin. 24, 978-982 (2004) (in Chinese).
  25. M. Bray, "Stitching interferometry: recent results and absolute calibration," Proc. SPIE 5252, 305-313 (2004).
  26. R. D. Day, T. A. Beery, and G. N. Lawrence, "Sphericity measurements of full spheres using subaperture optical testing techniques," Proc. SPIE 661, 334-341 (1986).
  27. G. N. Lawrence and R. D. Day, "Interferometric characterization of full spheres: data reduction techniques," Appl. Opt. 26, 4875-4882 (1987).
  28. Y. M. Liu, G. N. Lawrence, and C. L. Koliopoulo, "Subaperture testing of aspheres with annular zones," Appl. Opt. 27, 4504-4513 (1988).
  29. M. J. Tronolone, J. F. Fleig, C. S. Huang, and J. H. Bruning, "Method of testing aspherical optical surfaces with an interferometer," U.S. patent 5,416,586 (May 16, 1995).
  30. R. Murray, Z. X. Li, and S. S. Sastry, A Mathematical Introduction to Robotics Manipulation (CRC Press, 1994).
  31. Z. X. Li, J. B. Gou, and Y. X. Chu, "Geometric algorithm for workpiece localization," IEEE Trans. Rob. Autom. 14, 864-878 (1998).
  32. G. H. Gloub and C. F. Van Loan, Matrix Computations, 3rd ed. (Johns Hopkins U. Press, 1996), Section 12.1.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited