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Journal of the Optical Society of America A

Journal of the Optical Society of America A


  • Editor: Stephen A. Burns
  • Vol. 23, Iss. 3 — Mar. 1, 2006
  • pp: 567–571

Experimental characterization of focusing by high-numerical-aperture zone plates

Rajesh Menon, Dario Gil, and Henry I. Smith  »View Author Affiliations

JOSA A, Vol. 23, Issue 3, pp. 567-571 (2006)

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High-numerical-aperture zone plates have important applications in high-resolution optical maskless lithography as well as scanning confocal microscopy. We describe two methods to experimentally characterize the focusing properties, i.e., the point-spread function, of such diffractive lenses. The first method uses spot exposures in photoresist and the second uses a conventional knife-edge scan. The experimental results agree well with rigorous theoretical calculations.

© 2006 Optical Society of America

OCIS Codes
(050.1380) Diffraction and gratings : Binary optics
(080.3630) Geometric optics : Lenses
(090.1970) Holography : Diffractive optics
(110.3960) Imaging systems : Microlithography
(110.5220) Imaging systems : Photolithography
(180.1790) Microscopy : Confocal microscopy

ToC Category:
Imaging Systems

Original Manuscript: May 27, 2005
Revised Manuscript: August 2, 2005
Manuscript Accepted: August 3, 2005

Virtual Issues
Vol. 1, Iss. 4 Virtual Journal for Biomedical Optics

Rajesh Menon, Dario Gil, and Henry I. Smith, "Experimental characterization of focusing by high-numerical-aperture zone plates," J. Opt. Soc. Am. A 23, 567-571 (2006)

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  1. R. Menon, A. A. Patel, D. Gil and H. I. Smith, 'Maskless lithography,' Mater. Today , February 2005, pp. 26-33. [CrossRef]
  2. L. Kipp, M. Skibowski, R. L. Johnson, R. Berndt, R. Adelung, S. Harm, and R. Seemann, 'Sharper images by focusing soft X-rays with photon sieves,' Nature 414, 184-188 (2001). [CrossRef] [PubMed]
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  9. T. Wilson and C. J. R. Sheppard, Theory and Practice of Scanning Optical Microscopy (Academic, 1984), Chap. 3.

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