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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Editor: Stephen A. Burns
  • Vol. 23, Iss. 3 — Mar. 1, 2006
  • pp: 567–571

Experimental characterization of focusing by high-numerical-aperture zone plates

Rajesh Menon, Dario Gil, and Henry I. Smith  »View Author Affiliations


JOSA A, Vol. 23, Issue 3, pp. 567-571 (2006)
http://dx.doi.org/10.1364/JOSAA.23.000567


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Abstract

High-numerical-aperture zone plates have important applications in high-resolution optical maskless lithography as well as scanning confocal microscopy. We describe two methods to experimentally characterize the focusing properties, i.e., the point-spread function, of such diffractive lenses. The first method uses spot exposures in photoresist and the second uses a conventional knife-edge scan. The experimental results agree well with rigorous theoretical calculations.

© 2006 Optical Society of America

OCIS Codes
(050.1380) Diffraction and gratings : Binary optics
(080.3630) Geometric optics : Lenses
(090.1970) Holography : Diffractive optics
(110.3960) Imaging systems : Microlithography
(110.5220) Imaging systems : Photolithography
(180.1790) Microscopy : Confocal microscopy

ToC Category:
Imaging Systems

History
Original Manuscript: May 27, 2005
Revised Manuscript: August 2, 2005
Manuscript Accepted: August 3, 2005

Virtual Issues
Vol. 1, Iss. 4 Virtual Journal for Biomedical Optics

Citation
Rajesh Menon, Dario Gil, and Henry I. Smith, "Experimental characterization of focusing by high-numerical-aperture zone plates," J. Opt. Soc. Am. A 23, 567-571 (2006)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-23-3-567

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