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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Editor: Steven A. Burns
  • Vol. 24, Iss. 9 — Sep. 1, 2007
  • pp: 2692–2700

Computing shape parameter sensitivity of the field of one-dimensional surface-relief gratings by using an analytical approach based on RCWA

N. P. van der Aa and R. M.M. Mattheij  »View Author Affiliations


JOSA A, Vol. 24, Issue 9, pp. 2692-2700 (2007)
http://dx.doi.org/10.1364/JOSAA.24.002692


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Abstract

The rigorous coupled-wave analysis (RCWA) is a method to compute diffraction of a field by a given grating structure. Within various applications, such as metrology, it is important to know how the field reacts to small perturbations in the grating. This behavior can be expressed by the field derivatives with respect to a certain parameter. Approximations of these derivatives can be found by using finite differences where the field is computed for a neighboring value of the parameter, and the difference gives the derivative. Unfortunately, RCWA involves solving eigenvalue systems that are computationally expensive. Therefore, a faster alternative is given that computes the derivatives by straightforward differentiation of the relations within RCWA. Solving additional eigensystems is replaced by finding derivatives of eigenvalues and eigenvectors, which is less computationally expensive.

© 2007 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(050.1960) Diffraction and gratings : Diffraction theory

ToC Category:
Diffraction and Gratings

History
Original Manuscript: March 23, 2007
Revised Manuscript: May 14, 2007
Manuscript Accepted: May 14, 2007
Published: July 30, 2007

Citation
N. P. van der Aa and R. M. M. Mattheij, "Computing shape parameter sensitivity of the field of one-dimensional surface-relief gratings by using an analytical approach based on RCWA," J. Opt. Soc. Am. A 24, 2692-2700 (2007)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-24-9-2692

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