OSA's Digital Library

Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Editor: Stephen A. Burns
  • Vol. 26, Iss. 1 — Jan. 1, 2009
  • pp: 10–18

Error analysis and compensation method of focus detection in exposure apparatus

Yasuhiro Hidaka, Kiyoshi Uchikawa, and Daniel G. Smith  »View Author Affiliations


JOSA A, Vol. 26, Issue 1, pp. 10-18 (2009)
http://dx.doi.org/10.1364/JOSAA.26.000010


View Full Text Article

Enhanced HTML    Acrobat PDF (974 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

An original approach to measurement accuracy of a typical focus sensor in conventional integrated circuit lithographic equipment is introduced. Causes of measurement error in the focus sensor are theoretically analyzed and found to be generated mainly from interactions between imperfections of the optical system and the actual surface of processed wafers. We derive mathematical formulations describing these errors, which are confirmed by the experimental results performed by using an optical setup composed of the focus sensor and samples on which the wafer surface condition is reproduced. Furthermore, several novel techniques that are intended to reduce those measurement errors are successfully demonstrated.

© 2008 Optical Society of America

OCIS Codes
(110.2970) Imaging systems : Image detection systems
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(240.0310) Optics at surfaces : Thin films
(240.6490) Optics at surfaces : Spectroscopy, surface

ToC Category:
Optics at Surfaces

History
Original Manuscript: June 24, 2008
Revised Manuscript: October 17, 2008
Manuscript Accepted: October 25, 2008
Published: December 3, 2008

Citation
Yasuhiro Hidaka, Kiyoshi Uchikawa, and Daniel G. Smith, "Error analysis and compensation method of focus detection in exposure apparatus," J. Opt. Soc. Am. A 26, 10-18 (2009)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-26-1-10

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited