The actuator influence functions of a thin meniscus mirror can be expanded in Zernike polynomials. And the correctness of influence functions has a great effect on solving the correction forces. The Zernike coefficients are applied as parameters in the all-floating support system. We analyze the main interferential factors when different deformation modes are corrected. The influence caused by fitting errors is studied in this paper. A preferable result can be obtained after eliminating the interferential factors. The method can obtain useful correction forces. Comparing the peak-to-valley and root mean square values among the results calculated by different accuracy influence functions, we find that there is a limited convergence property when the accuracy increases.
© 2013 Optical Society of America
Optical Design and Fabrication
Original Manuscript: July 12, 2013
Revised Manuscript: September 13, 2013
Manuscript Accepted: September 15, 2013
Published: October 28, 2013
Hongqiao Wang, Bin Fan, Yongqian Wu, Haitao Liu, Rong Liu, and Fengtao Yan, "Influence study of solving correction forces caused by fitting errors for thin meniscus mirror," J. Opt. Soc. Am. A 30, 2409-2414 (2013)