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Time-and-frequency domains approach to data processing in multiwavelength optical scatterometry of dielectric gratings |
JOSA A, Vol. 30, Issue 3, pp. 427-436 (2013)
http://dx.doi.org/10.1364/JOSAA.30.000427
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Abstract
This paper focuses on scatterometry problems arising in lithography production of periodic gratings. Namely, the paper introduces a theoretical and numerical-modeling-oriented approach to scatterometry problems and discusses its capabilities. The approach allows for reliable detection of deviations in gratings’ critical dimensions (CDs) during the manufacturing process. The core of the approach is the one-to-one correspondence between the electromagnetic (EM) characteristics and the geometric/material properties of gratings. The approach is based on highly accurate solutions of initial boundary-value problems describing EM waves’ interaction on periodic gratings. The advantage of the approach is the ability to perform simultaneously and interactively both in frequency and time domains under conditions of possible resonant scattering of EM waves by infinite or finite gratings. This allows a detection of CDs for a wide range of gratings, and, thus is beneficial for the applied scatterometry.
© 2013 Optical Society of America
OCIS Codes
(000.3860) General : Mathematical methods in physics
(050.1950) Diffraction and gratings : Diffraction gratings
(050.1755) Diffraction and gratings : Computational electromagnetic methods
(120.4825) Instrumentation, measurement, and metrology : Optical time domain reflectometry
(050.5745) Diffraction and gratings : Resonance domain
ToC Category:
Diffraction and Gratings
History
Original Manuscript: October 26, 2012
Revised Manuscript: January 18, 2013
Manuscript Accepted: January 18, 2013
Published: February 18, 2013
Citation
Gérard Granet, Petr Melezhik, Kostyantyn Sirenko, and Nataliya Yashina, "Time-and-frequency domains approach to data processing in multiwavelength optical scatterometry of dielectric gratings," J. Opt. Soc. Am. A 30, 427-436 (2013)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-30-3-427
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