Abstract
The in-plane scattering patterns from a complex dielectric grating were both numerically and experimentally studied in contrast to those from well-known metallic gratings. The incidence was the transverse electric or transverse magnetic wave of wavelength . The grating profile was complex with a period , while the material was lightly doped crystalline silicon. Patterns of the electric field, magnetic field, and spatial intensity distribution were demonstrated at the normal () and oblique () incidence. Electric and magnetic fields were presented in the near field as well as the far field. The measured power ratio within was plotted. Their major peaks and the numerically obtained diffraction efficiency of 21 orders ( or ) of diffracted waves occurred at the same . Other peaks and stair-like shoulders of major peaks also exhibited in spectra.
© 2014 Optical Society of America
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