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Journal of the Optical Society of America A

Journal of the Optical Society of America A


  • Vol. 1, Iss. 7 — Jul. 1, 1984
  • pp: 706–710

Improved measurement method in rotating-analyzer ellipsometry

Shuichi Kawabata  »View Author Affiliations

JOSA A, Vol. 1, Issue 7, pp. 706-710 (1984)

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In rotating-analyzer ellipsometry, an improved measurement method that does not need the accurate adjustment of the optical components before measurement is described. By carrying out the measurements at two 90°-different azimuths of the polarizer, we can determine the orientation of the optical components to the plane of incidence and the ellipsometric parameters of the specimen at the same time. The method is also applicable to a new adjustment procedure that is simpler and more convenient than the usual methods. The versatility of this improved measurement method has been confirmed experimentally.

© 1984 Optical Society of America

Original Manuscript: October 21, 1983
Manuscript Accepted: February 24, 1984
Published: July 1, 1984

Shuichi Kawabata, "Improved measurement method in rotating-analyzer ellipsometry," J. Opt. Soc. Am. A 1, 706-710 (1984)

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