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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 11, Iss. 1 — Jan. 1, 1994
  • pp: 197–210

Light scattering from multilayer optics. I. Tools of investigation

C. Amra  »View Author Affiliations


JOSA A, Vol. 11, Issue 1, pp. 197-210 (1994)
http://dx.doi.org/10.1364/JOSAA.11.000197


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Abstract

We emphasize the role of correlated isotropy in the study of microroughness in high-quality optical coatings. First, cross correlation between surfaces and cross coherence between scattering sources are discussed and compared. An isotropy degree of roughness is then introduced as a quantitative value to describe the angular disorder of a surface connected with the polar dependence of scattering. We show how the frequency variations of this isotropy degree allow one to solve the inverse problem and obtain a unique solution for the scattering parameters that describe structural irregularities of the stacks. Light scattering can also be used to detect an oblique growth of the materials in thin-film form. Finally, we study the sensitivity of the investigation method to the stack parameters.

© 1994 Optical Society of America

History
Original Manuscript: December 14, 1992
Revised Manuscript: June 17, 1993
Manuscript Accepted: June 17, 1993
Published: January 1, 1994

Citation
C. Amra, "Light scattering from multilayer optics. I. Tools of investigation," J. Opt. Soc. Am. A 11, 197-210 (1994)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-11-1-197


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References

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