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Journal of the Optical Society of America A

Journal of the Optical Society of America A


  • Vol. 11, Iss. 1 — Jan. 1, 1994
  • pp: 197–210

Light scattering from multilayer optics. I. Tools of investigation

C. Amra  »View Author Affiliations

JOSA A, Vol. 11, Issue 1, pp. 197-210 (1994)

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We emphasize the role of correlated isotropy in the study of microroughness in high-quality optical coatings. First, cross correlation between surfaces and cross coherence between scattering sources are discussed and compared. An isotropy degree of roughness is then introduced as a quantitative value to describe the angular disorder of a surface connected with the polar dependence of scattering. We show how the frequency variations of this isotropy degree allow one to solve the inverse problem and obtain a unique solution for the scattering parameters that describe structural irregularities of the stacks. Light scattering can also be used to detect an oblique growth of the materials in thin-film form. Finally, we study the sensitivity of the investigation method to the stack parameters.

© 1994 Optical Society of America

Original Manuscript: December 14, 1992
Revised Manuscript: June 17, 1993
Manuscript Accepted: June 17, 1993
Published: January 1, 1994

C. Amra, "Light scattering from multilayer optics. I. Tools of investigation," J. Opt. Soc. Am. A 11, 197-210 (1994)

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  1. J. M. Bennett, L. Mattsson, Introduction to Surface Roughness and Scattering (Optical Society of America, Washington, D.C., 1989).
  2. J. M. Eastman, “Surface scattering in optical interference coatings,” Ph.D. dissertation (University of Rochester, Rochester, N.Y., 1974).
  3. C. K. Carniglia, “Scalar scattering theory for multilayer optical coatings,” Opt. Eng. 18, 104–115 (1979). [CrossRef]
  4. S. J. Gourley, P. H. Lissberger, “Optical scattering in multilayer thin films,” Opt. Acta 26, 117–143 (1979). [CrossRef]
  5. C. Grèzes-Besset, C. Amra, B. Cousin, G. Otrio, E. Pelletier, R. Richier, “Etude de la diaphonie d’un système de démultiplexage par filtres interférentiels. Conséquences de la diffusion de la lumière par les irrégularités des surfaces optiques,” Ann. Telecommun. 43, 135–141 (1988).
  6. J. M. Elson, J. P. Rahn, J. M. Bennett, “Light scattering from multilayer optics: comparison of theory and experiment,” Appl. Opt. 19, 669–679 (1980). [CrossRef]
  7. C. Amra, J. H. Apfel, E. Pelletier, “Role of interface correlation in light scattering by a multilayer,” Appl. Opt. 16, 3134–3151 (1992). [CrossRef]
  8. J. M. Elson, J. P. Rahn, J. Bennett, “Relationship of the total integrated scattering from multilayer-coated optics to angle of incidence, polarization, correlation-length, and roughness cross-correlation properties,” Appl. Opt. 22, 3207–3219 (1983). [CrossRef] [PubMed]
  9. C. Amra, “Scattering characterization of materials in thin film form,” in Laser-Induced Damage in Optical Materials 1989, H. E. Bennett, L. L. Chase, A. H. Guenther, B. E. Newnam, H. J. Soileau, eds., Proc. Soc. Photo-Opt. Instrum. Eng.1438, 309–323 (1990). [CrossRef]
  10. S. Kassam, A. Duparré, K. Hehl, P. Bussemer, J. Neubert, “Light scattering from the volume of optical thin films: theory and experiment,” Appl. Opt. 31, 1304–1313 (1992). [CrossRef] [PubMed]
  11. C. Amra, “First-order vector theory of bulk scattering in optical multilayers,” J. Opt. Soc. Am. A 10, 365–374 (1993). [CrossRef]
  12. C. Amra, L. Bruel, C. Grèzes-Besset, “Comparison of surface and bulk scattering in optical multilayers,” Appl. Opt. 32, 5492–5503 (1993). [CrossRef] [PubMed]
  13. C. Amra, “Light scattering from multilayer optics. II. Application to experiment,” J. Opt. Soc. Am. A 11, 211–226 (1994). [CrossRef]
  14. C. Amra, D. Torricini, Y. Boucher, E. Pelletier, “Scattering from optical surfaces and coatings: an easy investigation of microroughness,” in Optical Thin Films and Applications, R. Herrmann, ed., Proc. Soc. Photo-Opt. Instrum. Eng.1270, 72–81 (1990). [CrossRef]
  15. C. Amra, “Calculs et mesures de diffusion appliqués à l’étude de la rugosité dans les traitements optiques multicouches,”J. Opt. (Paris) 21, 83–98 (1990). [CrossRef]
  16. J. M. Elson, “Angle resolved light scattering from composite optical surfaces,” in Periodic Structures, Gratings, Moire Patterns, and Diffraction Phenomena I, C. H. Chi, ed., Proc. Soc. Photo-Opt. Instrum. Eng.240, 296–306 (1980). [CrossRef]
  17. P. Bousquet, F. Flory, P. Roche, “Scattering from multilayer thin films: theory and experiment,”J. Opt. Soc. Am. 71, 1115–1123 (1981). [CrossRef]
  18. C. Amra, P. Bousquet, “Scattering from surfaces and multilayer coatings: recent advances for a better investigation of experiment,” in Surface Measurement and Characterization, J. M. Bennett, ed., Proc. Soc. Photo-Opt. Instrum. Eng.1009, 82–97 (1988). [CrossRef]
  19. C. Amra, C. Grèzes-Besset, P. Roche, E. Pelletier, “Description of a scattering apparatus: application to the problems of characterization of opaque surfaces,” Appl. Opt. 28, 2723–2730 (1989). [CrossRef] [PubMed]
  20. F. E. Nicodemus, “Directional reflectance and emissivity of an opaque surface,” Appl. Opt. 4, 767–773 (1965). [CrossRef]
  21. C. Amra, P. Roche, E. Pelletier, “Interface roughness cross-correlation laws deduced from scattering diagram measurements on optical multilayers: effect of the material grain size,” J. Opt. Soc. Am. B 4, 1087–1093 (1987). [CrossRef]
  22. P. Roche, E. Pelletier, G. Albrand, “Antiscattering transparent monolayers: theory and experiment,” J. Opt. Soc. Am. A 1, 1032–1033 (1984). [CrossRef]
  23. P. Roche, P. Bousquet, F. Flory, J. Garcin, E. Pelletier, G. Albrand, “Determination of interface roughness cross-correlation properties of an optical coating from measurements of the angular scattering,” J. Opt. Soc. Am. A 1, 1028–1031 (1984). [CrossRef]
  24. C. Amra, G. Albrand, P. Roche, “Theory and application of antiscattering single layers: antiscattering antireflection coatings,” Appl. Opt. 25, 2695–2702 (1986). [CrossRef] [PubMed]
  25. A. G. Dirks, H. J. Leamy, “Columnar microstructure in vapor-deposited thin films,” Thin Solid Films 47, 219–223 (1977). [CrossRef]
  26. C. Amra, “Scattering distribution from multilayer mirrors: theoretical research of a design for minimum losses,” in Laser-Induced Damage in Optical Materials, H. E. Bennett, A. H. Guenther, D. Milam, B. E. Newnam, eds., Natl. Inst. Stand. Technol. Spec. Publ.752, 594–602 (1986).

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