OSA's Digital Library

Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 11, Iss. 1 — Jan. 1, 1994
  • pp: 211–226

Light scattering from multilayer optics. II. Application to experiment

C. Amra  »View Author Affiliations


JOSA A, Vol. 11, Issue 1, pp. 211-226 (1994)
http://dx.doi.org/10.1364/JOSAA.11.000211


View Full Text Article

Enhanced HTML    Acrobat PDF (1933 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

The tools of investigation presented in part I of this study [ J. Opt. Soc. Am. A 11, 197 ( 1994)] are applied to the analysis of experimental results. First the limits of the scatterometer are analyzed in detail. Problems of calibration, parasitic light, linearity, and repeatability of measurements are discussed. The roughness spectrum is shown to be an intrinsic property of surface defects. It is proved that this spectrum is perfectly reproduced in the whole range of measurable spatial frequencies by a metallic layer. Dielectric materials under study are TiO2, Ta2O5, and SiO2 obtained by ion-assisted deposition, ion plating, and electron beam evaporation. The inverse problem is solved with isotropy degree curves, and the scattering parameters that are low-pass filters and residual spectra are extracted for single layers and multilayers. Replication of defects in the measurable bandwidth is shown to be perfect at all interfaces of a multilayer. In addition, the thin-film materials bring low residual roughnesses. Coatings are also produced at oblique deposition, and light scattering is used to detect the oblique growth of the thin-film layers. The role of local defects is investigated.

© 1994 Optical Society of America

History
Original Manuscript: December 14, 1992
Revised Manuscript: June 17, 1993
Manuscript Accepted: June 17, 1993
Published: January 1, 1994

Citation
C. Amra, "Light scattering from multilayer optics. II. Application to experiment," J. Opt. Soc. Am. A 11, 211-226 (1994)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-11-1-211

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you are accessing the full text through a member bundle, please use the Enhanced HTML link to gain access to the citation lists and other restricted features. Note that accessing both the PDF and HTML versions of an article will count as only one download against your account.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you are accessing the full text through a member bundle, please use the Enhanced HTML link to gain access to the citation lists and other restricted features. Note that accessing both the PDF and HTML versions of an article will count as only one download against your account.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you wish to use one of your free member downloads to view the figures, click "Enhanced HTML" above and access the figures from the article itself or from the navigation tab.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you are accessing the full text through a member bundle, please use the Enhanced HTML link to gain access to the citation lists and other restricted features. Note that accessing both the PDF and HTML versions of an article will count as only one download against your account.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited