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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 11, Iss. 10 — Oct. 1, 1994
  • pp: 2593–2603

Effect of point-spread functions on precision edge measurement

Raymond G. White and Robert A. Schowengerdt  »View Author Affiliations


JOSA A, Vol. 11, Issue 10, pp. 2593-2603 (1994)
http://dx.doi.org/10.1364/JOSAA.11.002593


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Abstract

We explore the effect that an image-formation system’s point-spread function (PSF) has on measurement of the orientation and position of step edges. The theory of locales is used for numerical computation of bounds on precision as a function of PSF size and shape. It is shown that in the noise-free case the PSF should be 0.5–0.9 pixel in radius for optimal precision to be achieved. PSF shape is shown to have a much lesser effect on precision. A one-dimensional noisy-edge model is analyzed, and results similar to the no-noise case are obtained.

© 1994 Optical Society of America

History
Original Manuscript: October 7, 1993
Revised Manuscript: May 10, 1994
Manuscript Accepted: May 24, 1994
Published: October 1, 1994

Citation
Raymond G. White and Robert A. Schowengerdt, "Effect of point-spread functions on precision edge measurement," J. Opt. Soc. Am. A 11, 2593-2603 (1994)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-11-10-2593

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