We explore the effect that an image-formation system’s point-spread function (PSF) has on measurement of the orientation and position of step edges. The theory of locales is used for numerical computation of bounds on precision as a function of PSF size and shape. It is shown that in the noise-free case the PSF should be 0.5–0.9 pixel in radius for optimal precision to be achieved. PSF shape is shown to have a much lesser effect on precision. A one-dimensional noisy-edge model is analyzed, and results similar to the no-noise case are obtained.
© 1994 Optical Society of America
Original Manuscript: October 7, 1993
Revised Manuscript: May 10, 1994
Manuscript Accepted: May 24, 1994
Published: October 1, 1994
Raymond G. White and Robert A. Schowengerdt, "Effect of point-spread functions on precision edge measurement," J. Opt. Soc. Am. A 11, 2593-2603 (1994)