OSA's Digital Library

Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 11, Iss. 12 — Dec. 1, 1994
  • pp: 3284–3291

Polynomial inversion of the single transparent layer problem in ellipsometry

Jean-Pierre Drolet, Stoyan C. Russev, Maxim I. Boyanov, and Roger M. Leblanc  »View Author Affiliations


JOSA A, Vol. 11, Issue 12, pp. 3284-3291 (1994)
http://dx.doi.org/10.1364/JOSAA.11.003284


View Full Text Article

Enhanced HTML    Acrobat PDF (883 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

It is shown that for a uniform transparent layer over a substrate the layer dielectric constant satisfies a fifth-degree polynomial. The problem of extracting the layer index and thickness from the ellipsometric measurement is then reduced to finding the roots of this polynomial. The coefficients of this polynomial are determined by the angle of incidence, the real incident-medium index, the complex substrate index, and the measured complex ellipsometric ratio ρ. This approach to the problem gives directly all the possible physical solutions without the need for initial guesses or ranges. Special cases are examined. Numerical analysis and error analysis are provided for the case of a silicon oxide layer over silicon.

© 1994 Optical Society of America

History
Original Manuscript: March 15, 1994
Revised Manuscript: June 24, 1994
Manuscript Accepted: June 29, 1994
Published: December 1, 1994

Citation
Jean-Pierre Drolet, Stoyan C. Russev, Roger M. Leblanc, and Maxim I. Boyanov, "Polynomial inversion of the single transparent layer problem in ellipsometry," J. Opt. Soc. Am. A 11, 3284-3291 (1994)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-11-12-3284


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977), Chap. 4.
  2. S. C. Russev, D. D. Georgieva, “Analytical solution of another ellipsometric inverse problem,” J. Mod. Opt. 38, 1217–1222 (1991). [CrossRef]
  3. Information available on request from S. C. Russev and M. I. Boyanov at the address on the title page of the present paper.
  4. J. Lekner, “Analytic inversion of ellipsometric data for an unsupported nonabsorbing uniform layer,” J. Opt. Soc. Am. A 7, 1875–1877 (1990). [CrossRef]
  5. R. M. A. Azzam, “Simple and direct determination of complex refractive index and thickness of unsupported or embedded thin films by combined reflection and transmission ellipsometry at 45° angle of incidence,” J. Opt. Soc. Am. 73, 1080–1082 (1983). [CrossRef]
  6. R. M. A. Azzam, “Ellipsometry of unsupported and embedded thin films,” J. Phys. (Paris) C10, 67–70 (1983).
  7. R. M. A. Azzam, “Transmission ellipsometry on transparent unbacked or embedded thin films with application to soap films in air,” Appl. Opt. 30, 2801–2806 (1991). [CrossRef] [PubMed]
  8. E. E. Dagman, “Analytical solution of the inverse ellipsometry problem in the modeling of a single-layer reflecting system,” Opt. Spectrosc. (USSR) 62, 500–503 (1987).
  9. R. M. A. Azzam, B. E. Perilloux, “Constraint on the optical constants of a film-substrate system for operation as an external-reflection retarder at a given angle of incidence,” Appl. Opt. 24, 1171–1179 (1985). [CrossRef] [PubMed]
  10. R. M. A. Azzam, B. E. Perilloux, “Equalization of the complex reflection coefficients for the parallel and perpendicular polarizations of an absorbing substrate coated by a transparent thin film,” Opt. Acta 32, 767–777 (1985). [CrossRef]
  11. V. Krisdhasima, J. McGuire, R. Sproull, “A one-film-model ellipsometry program for the simultaneous calculation of protein film thickness and refractive index,” Surf. Interface Anal. 18, 453–456 (1992). [CrossRef]
  12. F. K. Urban, “Ellipsometry algorithm for absorbing films,” Appl. Opt. 32, 2339–2344 (1993). [CrossRef]
  13. Y. Yoriume, “Method for numerical inversion of the ellipsometry equation for transparent films,” J. Opt. Soc. Am. 73, 888–891 (1983). [CrossRef]
  14. O. Hunderi, “New method for accurate determination of optical constants,” Appl. Opt. 11, 1572–1578 (1972). [CrossRef] [PubMed]
  15. A. R. Reinberg, “Ellipsometer data analysis with a small programmable desk calculator,” Appl. Opt. 11, 1273–1274 (1972). [CrossRef] [PubMed]
  16. T. Yamaguchi, H. Takahashi, “Ellipsometric method for separate measurement of nand dof a transparent film,” Appl. Opt. 14, 2010–2015 (1975). [CrossRef] [PubMed]
  17. F. L. McCrackin, E. Passaglia, R. R. Stromberg, H. L. Steinberg, “Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometry,”J. Res. Nat. Bur. Stand. Sect. A 67, 363–377 (1963). [CrossRef]
  18. M. C. Dorf, J. Lekner, “Reflection and transmission ellipsometry of a uniform layer,” J. Opt. Soc. Am. A 4, 2096–2100 (1987). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited