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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 11, Iss. 12 — Dec. 1, 1994
  • pp: 3308–3321

Illustration of second-order design methods: global merit function plots for a class of projection systems

Bryan D. Stone and G. W. Forbes  »View Author Affiliations


JOSA A, Vol. 11, Issue 12, pp. 3308-3321 (1994)
http://dx.doi.org/10.1364/JOSAA.11.003308


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Abstract

Recently developed methods [ J. Opt. Soc. Am. A 11, 3292– 3307 ( 1994)] permit definitive studies of two-mirror systems for a variety of applications. As an illustration of such a study, unobstructed, telecentric, plane-symmetric systems of two conic mirrors that are intended for distortion-free projection are investigated here. The magnification, speed, and field size in the examples are arbitrarily chosen to correspond to values that are appropriate for full-field soft-x-ray projection lithography. Low-order imaging constraints are applied to eliminate most of the 13 parameters that specify the configuration of such a system. It is shown that there are just two three-parameter families of systems and a single four-parameter family. The associated three-and four-dimensional merit function spaces are mapped, and selected systems from various regions of the spaces are discussed.

© 1994 Optical Society of America

History
Original Manuscript: October 26, 1993
Revised Manuscript: July 7, 1994
Manuscript Accepted: July 7, 1994
Published: December 1, 1994

Citation
Bryan D. Stone and G. W. Forbes, "Illustration of second-order design methods: global merit function plots for a class of projection systems," J. Opt. Soc. Am. A 11, 3308-3321 (1994)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-11-12-3308

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