OSA's Digital Library

Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 11, Iss. 7 — Jul. 1, 1994
  • pp: 2156–2158

Determination of complex refractive index and thickness of a homogeneous layer by combined reflection and transmission ellipsometry

John Lekner  »View Author Affiliations


JOSA A, Vol. 11, Issue 7, pp. 2156-2158 (1994)
http://dx.doi.org/10.1364/JOSAA.11.002156


View Full Text Article

Enhanced HTML    Acrobat PDF (295 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Analytic inversion of combined reflection and transmission ellipsometric data is demonstrated. When the thickness is eliminated between the equations that give the reflection and transmission ratios ρ = rp/rs and τ = tp/ts, an algebraic equation for the unknown dielectric constant ε of the layer is obtained. After removal of some factors, this reduces to a linear equation in ε. The solution for unsupported films agrees with that previously obtained by Azzam [ J. Phys. (Paris) C10, 67 ( 1993)]; it can be simplified to ε = ε1 sin2θ1/(cos2θ1ρ/τ), where ε1 is the dielectric constant of the ambient medium and θ1 is the angle of incidence. Stability of the solution with respect to noise in the data is analyzed.

© 1994 Optical Society of America

History
Original Manuscript: September 7, 1993
Revised Manuscript: November 22, 1993
Manuscript Accepted: January 11, 1994
Published: July 1, 1994

Citation
John Lekner, "Determination of complex refractive index and thickness of a homogeneous layer by combined reflection and transmission ellipsometry," J. Opt. Soc. Am. A 11, 2156-2158 (1994)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-11-7-2156


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. R. M. A. Azzam, “Ellipsometry of unsupported and embedded thin films,” J. Phys. (Paris) C10, 67–70 (1983).
  2. R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).
  3. J. Lekner, Theory of Reflection (Nijhoff/Kluwer, Dordrecht, The Netherlands, 1987).
  4. M. C. Dorf, J. Lekner, “Reflection and transmission ellipsometry of a uniform layer,” J. Opt. Soc. Am. A 4, 2096–2100 (1987). [CrossRef]
  5. J. Lekner, “Inversion of reflection ellipsometric data,” Appl. Opt. (to be published). [PubMed]
  6. J. Lekner, “Inversion of transmission ellipsometric data for transparent films,” Appl. Opt. (to be published).
  7. J. Lekner, “Ellipsometry of a thin film between similar media,” J. Opt. Soc. Am. A 5, 1041–1043 (1988). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited