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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 11, Iss. 7 — Jul. 1, 1994
  • pp: 2156–2158

Determination of complex refractive index and thickness of a homogeneous layer by combined reflection and transmission ellipsometry

John Lekner  »View Author Affiliations


JOSA A, Vol. 11, Issue 7, pp. 2156-2158 (1994)
http://dx.doi.org/10.1364/JOSAA.11.002156


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Abstract

Analytic inversion of combined reflection and transmission ellipsometric data is demonstrated. When the thickness is eliminated between the equations that give the reflection and transmission ratios ρ = rp/rs and τ = tp/ts, an algebraic equation for the unknown dielectric constant ε of the layer is obtained. After removal of some factors, this reduces to a linear equation in ε. The solution for unsupported films agrees with that previously obtained by Azzam [ J. Phys. (Paris) C10, 67 ( 1993)]; it can be simplified to ε = ε1 sin2θ1/(cos2θ1ρ/τ), where ε1 is the dielectric constant of the ambient medium and θ1 is the angle of incidence. Stability of the solution with respect to noise in the data is analyzed.

© 1994 Optical Society of America

History
Original Manuscript: September 7, 1993
Revised Manuscript: November 22, 1993
Manuscript Accepted: January 11, 1994
Published: July 1, 1994

Citation
John Lekner, "Determination of complex refractive index and thickness of a homogeneous layer by combined reflection and transmission ellipsometry," J. Opt. Soc. Am. A 11, 2156-2158 (1994)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-11-7-2156

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