Calibration improvement of Fourier transform infrared phase-modulated ellipsometry

A. Canillas; E. Pascual; E. Bertran

doi:10.1364/JOSAA.13.002461

Journal of the Optical Society of America A
Vol. 13,
Issue 12,
pp. 2461-2467
(1996)
•https://doi.org/10.1364/JOSAA.13.002461

Calibration improvement of Fourier transform infrared phase-modulated ellipsometry

A. Canillas, E. Pascual, and E. Bertran

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
A. Canillas, E. Pascual, and E. Bertran, "Calibration improvement of Fourier transform infrared phase-modulated ellipsometry," J. Opt. Soc. Am. A 13, 2461-2467 (1996)

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

An improved self-consistent calibration procedure has been developed for FTIR phase-modulated ellipsometers. The new calibration method basically considers the effect of multiple reflections between the modulator faces in the intensity detected. The alignment, orientation, and calibration procedures are described in detail. The use of extra polarizers or analyzers is also discussed. The new calibration method removes the Bessel function background with an accuracy better than 0.5% in the wave-number range from 1000 to 4000 cm⁻¹. The examples provided illustrate the accuracy in the measurement of Ψ and Δ angles, which turns out to be less than 1° on average.

Full Article | PDF Article

More Like This

Error correction for calibration and data reduction in rotating-polarizer ellipsometry: applications to a novel multichannel ellipsometer

N. V. Nguyen, B. S. Pudliner, Ilsin An, and R. W. Collins
J. Opt. Soc. Am. A 8(6) 919-931 (1991)

Infrared rotating-analyzer ellipsometry: calibration and data processing

V. A. Yakovlev, M. Li, and E. A. Irene
J. Opt. Soc. Am. A 10(3) 509-514 (1993)

Application of Fourier transform infrared ellipsometry to assess the concentration of biological molecules

Enric Garcia-Caurel, Bernard Drévillon, Antonello De Martino, and Laurent Schwartz
Appl. Opt. 41(34) 7339-7345 (2002)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (22)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Model	K_σ (rad/cm⁻¹)	T₂	α	β	δ²
Orientation M = −45°
A	9.20 × 10−⁴	0.89	—	—	6.1 × 10−⁵
B	9.44 × 10−⁴	0.94	0.028	—	1.6 × 10−⁵
C	9.47 × 10−⁴	0.93	0.035	2.8	2.0 × 10−⁶
Orientation M = +45°
A	9.31 × 10−⁴	0.88	—	—	1.7 × 10−⁴
B	9.45 × 10−⁴	0.90	0.025	—	6.1 × 10−⁵
C	9.38 × 10−⁴	0.91	0.026	3.2	3.2 × 10−⁵

Model	K_σ (rad/cm⁻¹)	T₂	α	β	δ²
Orientation M = −45°
A	1.157 × 10⁻³	0.90	—	—	1.2 × 10⁻⁴
B	1.163 × 10⁻³	0.94	0.030	—	1.8 × 10⁻⁵
C	1.165 × 10⁻³	0.95	0.038	2.8	1.4 × 10⁻⁶
Orientation M = +45°
A	1.149 × 10⁻³	0.87	—	—	2.6 × 10⁻¹
B	1.141 × 10⁻³	0.92	0.050	—	1.0 × 10⁻²
C	1.144 × 10⁻³	0.92	0.048	2.8	1.2 × 10⁻⁴

Model	K_σ (rad/cm⁻¹)	T₂	α	β	δ²
Orientation M = −45°
A	9.20 × 10−⁴	0.89	—	—	6.1 × 10−⁵
B	9.44 × 10−⁴	0.94	0.028	—	1.6 × 10−⁵
C	9.47 × 10−⁴	0.93	0.035	2.8	2.0 × 10−⁶
Orientation M = +45°
A	9.31 × 10−⁴	0.88	—	—	1.7 × 10−⁴
B	9.45 × 10−⁴	0.90	0.025	—	6.1 × 10−⁵
C	9.38 × 10−⁴	0.91	0.026	3.2	3.2 × 10−⁵

Model	K_σ (rad/cm⁻¹)	T₂	α	β	δ²
Orientation M = −45°
A	1.157 × 10⁻³	0.90	—	—	1.2 × 10⁻⁴
B	1.163 × 10⁻³	0.94	0.030	—	1.8 × 10⁻⁵
C	1.165 × 10⁻³	0.95	0.038	2.8	1.4 × 10⁻⁶
Orientation M = +45°
A	1.149 × 10⁻³	0.87	—	—	2.6 × 10⁻¹
B	1.141 × 10⁻³	0.92	0.050	—	1.0 × 10⁻²
C	1.144 × 10⁻³	0.92	0.048	2.8	1.2 × 10⁻⁴

Abstract

Cited By

Figures (6)

Tables (2)

Equations (22)

Journal of the Optical Society of America A