OSA's Digital Library

Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 14, Iss. 6 — Jun. 1, 1997
  • pp: 1268–1278

Optical diffraction of focused spots and subwavelength structures

D. S. Marx and D. Psaltis  »View Author Affiliations


JOSA A, Vol. 14, Issue 6, pp. 1268-1278 (1997)
http://dx.doi.org/10.1364/JOSAA.14.001268


View Full Text Article

Enhanced HTML    Acrobat PDF (426 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We have developed a numerical diffraction tool for cases in which the incident field is a focused spot and the diffracting structure is a single structure or an aperiodic surface. Our approach uses the integral formulation to solve Maxwell's equations and is different from previously published methods in its choice of basis function. We compared numerical results with experimental measurements of the far-field intensity for a focused spot incident on an aluminum grating, and the comparison was favorable. Finally, we predict the diffraction behavior of the proposed digital video disk format for the next generation of optical disk. Our analysis shows that the reflected signal for this format has a strong dependence on the polarization of the incident light.

© 1997 Optical Society of America

History
Original Manuscript: August 9, 1996
Revised Manuscript: December 20, 1996
Manuscript Accepted: December 20, 1996
Published: June 1, 1997

Citation
D. S. Marx and D. Psaltis, "Optical diffraction of focused spots and subwavelength structures," J. Opt. Soc. Am. A 14, 1268-1278 (1997)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-14-6-1268


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. J. G. Dil, B. A. Jacobs, “Apparent size of reflecting polygonal obstacles of the order of one wavelength,” J. Opt. Soc. Am. 69, 950–960 (1979). [CrossRef]
  2. G. Bouwhuis, J. Braat, A. Huijser, J. Pasman, G. van Rosmalen, K. S. Immink, Principles of Optical Disc Systems (Hilger, Bristol, UK, 1985), Chap. 6.
  3. D. Maystre, “Rigorous theory of light scattering from rough surfaces,” J. Opt. (Paris) 15, 43–51 (1984). [CrossRef]
  4. A. K. Fung, M. F. Chen, “Numerical simulation of scattering from simple and composite random surfaces,” J. Opt. Soc. Am. A 2, 2274–2284 (1985). [CrossRef]
  5. G. S. White, J. F. Marchiando, “Scattering from a V-shaped groove in the resonance domain,” Appl. Opt. 22, 2308–2312 (1983). [CrossRef] [PubMed]
  6. E. R. Mendez, K. A. O’Donnell, “Observation of depolarization and backscattering enhancement in light scattering from Gaussian random surfaces,” Opt. Commun. 61, 91–95 (1987). [CrossRef]
  7. The National Technology Roadmap for Semiconductors (Semiconductor Industry Association, San Jose, Calif., 1994).
  8. C. J. Raymond, M. R. Murnane, S. L. Prins, S. S. H. Naqvi, J. R. McNeil, J. W. Hosch, “Multi-parameter CD measurements using scatterometry,” in Metrology Inspection and Process Control for Microlithography X, S. K. Jones, ed., Proc. SPIE2725, 698–709 (1996). [CrossRef]
  9. C. J. Raymond, S. S. H. Naqvi, J. R. McNeil, “Scatterometry for CD measurements of etched structures,” in Metrology Inspection and Process Control for Microlithography X, S. K. Jones, ed., Proc. SPIE2725, 720–728 (1996). [CrossRef]
  10. R. Petit, Electromagnetic Theory of Gratings, Vol. 22 of Topics in Current Physics (Springer-Verlag, Berlin, 1980). [CrossRef]
  11. M. Neviere, R. Petit, M. Cadilhac, “About the theory of optical grating coupler-waveguide systems,” Opt. Commun. 8, 113–117 (1973). [CrossRef]
  12. J. P. Hugonin, R. Petit, “A numerical study of the problem of diffraction at a non-periodic obstacle,” Opt. Commun. 20, 360–364 (1977). [CrossRef]
  13. A. Wirgin, “A new theoretical approach to scattering from a periodic interface,” Opt. Commun. 27, 189–194 (1978). [CrossRef]
  14. K. Knop, “Rigorous diffraction theory for transmission phase gratings with deep rectangular grooves,” J. Opt. Soc. Am. 68, 1206–1210 (1978). [CrossRef]
  15. F. G. Kaspar, “Diffraction by thick, periodically modified gratings with complex dielectric constant,” J. Opt. Soc. Am. 63, 37–45 (1973). [CrossRef]
  16. M. G. Moharam, T. K. Gaylord, “Rigorous coupled-wave analysis of planar-grating diffraction,” J. Opt. Soc. Am. 71, 811–818 (1981). [CrossRef]
  17. M. G. Moharam, T. K. Gaylord, “Diffraction analysis of dielectric surface-relief gratings,” J. Opt. Soc. Am. 72, 1385–1392 (1982). [CrossRef]
  18. T. K. Gaylord, M. G. Moharam, “Planar dielectric grating diffraction theories,” Appl. Phys. B 28, 1–14 (1982). [CrossRef]
  19. W. B. Veldkamp, G. J. Swanson, S. A. Gaither, C.-L. Chen, T. R. Osborne, “Binary optics: a diffraction analysis,” (Massachusetts Institute of Technology Lincoln Laboratory, Lexington, Mass.1989).
  20. A. T. De Hoop, Modern Topics in Electromagnetics and Antennas, PPL Conf. Publ. 13 (Peter Peregrinus Ltd., Stevenage, UK, 1977), Chap. 6.
  21. W. H. Press, B. P. Flannery, S. A. Teukolsky, W. T. Vetterling, Numerical Recipes in C (Cambridge U. Press, Cambridge, 1988).
  22. L. M. Delves, J. L. Mohamed, Computational Methods for Integral Equations (Cambridge U. Press, Cambridge, 1985).
  23. M. Mansuripur, “Distribution of light at and near the focus of high-numerical-aperture objectives: erratum,” J. Opt. Soc. Am. A 10, 382–383 (1993). [CrossRef]
  24. J. A. Stratton, Electromagnetic Theory (McGraw-Hill, New York, 1941), Chap. 6.
  25. M. Born, E. Wolf, Principles of Optics, 6th ed. (Pergamon, New York, 1980), Chap. 8.
  26. E. Wolf, “Electromagnetic diffraction in optical systems. 1. An integral representation of the image field,” Proc. R. Soc. London, Ser. A 253, 349–357 (1959). [CrossRef]
  27. J. Goodman, Introduction to Fourier Optics (McGraw-Hill, San Francisco, 1968).
  28. R. F. Harrington, Time-Harmonic Electromagnetic Fields (McGraw-Hill, New York, 1961).
  29. E. D. Palik, ed., Handbook of Optical Constants of Solids (Academic, Orlando, Fla., 1985).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited