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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 15, Iss. 3 — Mar. 1, 1998
  • pp: 622–624

Resolution for off-axis illumination

Colin J. R. Sheppard and Zoltan Hegedus  »View Author Affiliations


JOSA A, Vol. 15, Issue 3, pp. 622-624 (1998)
http://dx.doi.org/10.1364/JOSAA.15.000622


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Abstract

The fundamental limit to resolution of a perfect lens for off-axis object points is considered. It has been shown previously that resolution decreases with illumination. Here it is shown that the relative decrease in resolution with illumination angle is reduced for lenses of higher numerical aperture. These results are of importance for optical systems that combine high aperture with large field of view, such as lithographic lenses.

© 1998 Optical Society of America

OCIS Codes
(050.1940) Diffraction and gratings : Diffraction
(120.4570) Instrumentation, measurement, and metrology : Optical design of instruments
(220.2560) Optical design and fabrication : Propagating methods

History
Original Manuscript: June 6, 1997
Revised Manuscript: August 28, 1997
Manuscript Accepted: September 15, 1997
Published: March 1, 1998

Citation
Colin J. R. Sheppard and Zoltan Hegedus, "Resolution for off-axis illumination," J. Opt. Soc. Am. A 15, 622-624 (1998)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-15-3-622

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