Our investigation uses the film-interference transmittance spectrum in the computer calculation of thin-film thickness t and complex refractive index n^*=n−ik. Titanium oxide films of different thicknesses are studied, and a new approach to determine the film thickness and optical constants is proposed. This new approach is based on the use of numerical optimization methods in transmittance-spectra fitting. Various dispersion equations of the finite-power-series type are used to obtain the best fit between transmittance measurements and calculations. The best-fit results for n(λ) and k(λ) are found to agree with dispersion relations that follow from a quantum theory of light absorption.

© 1998 Optical Society of America

[Optical Society of America ]

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