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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 16, Iss. 2 — Feb. 1, 1999
  • pp: 331–338

Light scattering from slightly rough dielectric films

Yu. S. Kaganovskii, V. D. Freilikher, E. Kanzieper, Y. Nafcha, M. Rosenbluh, and I. M. Fuks  »View Author Affiliations


JOSA A, Vol. 16, Issue 2, pp. 331-338 (1999)
http://dx.doi.org/10.1364/JOSAA.16.000331


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Abstract

It is shown that the long-scale (smooth) component of the roughness spectrum of a slightly rough dielectric layer critically affects the angular distribution of radiation scattered from the surface. The interference pattern obtained from a sample with only small-scale roughness differs drastically from a sample with the same small-scale roughness but possessing slight (of the order λ/10) variation of the thickness of the dielectric layer. It is shown that when interference phenomena are significant and the dielectric film has long-scale roughness, conventional perturbation theory is invalid, even if the rms of roughness is much smaller than the wavelength. A model is presented that correctly predicts the measured angular intensity distributions in the scattered-light field for samples that possess arbitrary scales of roughness.

© 1999 Optical Society of America

OCIS Codes
(240.0240) Optics at surfaces : Optics at surfaces
(240.0310) Optics at surfaces : Thin films
(240.5770) Optics at surfaces : Roughness
(260.3160) Physical optics : Interference
(290.0290) Scattering : Scattering
(290.5880) Scattering : Scattering, rough surfaces

History
Original Manuscript: May 1, 1998
Revised Manuscript: September 8, 1998
Manuscript Accepted: September 21, 1998
Published: February 1, 1999

Citation
Yu. S. Kaganovskii, V. D. Freilikher, E. Kanzieper, Y. Nafcha, M. Rosenbluh, and I. M. Fuks, "Light scattering from slightly rough dielectric films," J. Opt. Soc. Am. A 16, 331-338 (1999)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-16-2-331


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