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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 16, Iss. 2 — Feb. 1, 1999
  • pp: 371–377

Combined grazing-angle and normal-incidence reflectometry of absorbing media

R. Z. Vitlina, G. I. Surdutovich, and V. Baranauskas  »View Author Affiliations


JOSA A, Vol. 16, Issue 2, pp. 371-377 (1999)
http://dx.doi.org/10.1364/JOSAA.16.000371


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Abstract

We have studied the grazing-incidence differential-reflectance method for obtaining the dielectric function of absorbing media in terms of the derivatives Rp and Rs of the polarized light reflectances and found that it does not guarantee adequate accuracy for almost any values of the optical parameters. Therefore we modify that approach and describe what we believe is a novel method for the unambiguous determination of the optical constants n and k of a metal and other absorbing materials in terms of the ratio of the derivatives α=Rp/Rs at the grazing incidence and the normal incidence reflection coefficient R. Moreover, it is possible to express α through the logarithmic derivatives (1/R)R in the vicinity of the grazing angle. The possibility of performing measurements at the unspecified angle without knowledge of the explicit value of this angle is an evident advantage of this technique. For the great majority of metals and semiconductors the relative errors in the optical constants are comparable to or less than the relative errors in the experimentally measured parameters.

© 1999 Optical Society of America

OCIS Codes
(120.4530) Instrumentation, measurement, and metrology : Optical constants
(120.5410) Instrumentation, measurement, and metrology : Polarimetry
(260.2130) Physical optics : Ellipsometry and polarimetry
(260.3910) Physical optics : Metal optics
(260.5430) Physical optics : Polarization
(300.1030) Spectroscopy : Absorption

History
Original Manuscript: May 22, 1998
Revised Manuscript: September 22, 1998
Manuscript Accepted: October 15, 1998
Published: February 1, 1999

Citation
R. Z. Vitlina, G. I. Surdutovich, and V. Baranauskas, "Combined grazing-angle and normal-incidence reflectometry of absorbing media," J. Opt. Soc. Am. A 16, 371-377 (1999)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-16-2-371


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References

  1. J. A. Dobrowolski, “Optical properties of films and coatings,” in Handbook of Optics, M. Bass, ed. (McGraw-Hill, New York, 1995), Secs. 42.1–42.130.
  2. E. D. Palik, Handbook of Optical Constants of Solids (Academic, San Diego, Calif., 1985); Handbook of Optical Constants of Solids, II (Academic, Boston, Mass., 1991).
  3. W. R. Hunter, “Measurement of optical properties of materials in the vacuum ultraviolet spectral region,” Appl. Opt. 21, 2103–2114 (1982). [CrossRef] [PubMed]
  4. S. P. F. Humphreys-Owen, “Comparison of reflection methods for measuring optical constants without polarimetric analysis, and proposal for new methods based on the Brewster angle,” Proc. Phys. Soc. London 77, 949–957 (1961). [CrossRef]
  5. M. R. Querry, “Direct solution of the generalized Fresnel reflection equations,” J. Opt. Soc. Am. 59, 876–877 (1969). [CrossRef]
  6. R. F. Miller, A. J. Taylor, L. S. Julien, “The optimum angle of incidence for determining optical constants from reflectance measurements,” J. Phys. D 3, 1957–1961 (1970). [CrossRef]
  7. J. M. Bennett, H. E. Bennett, “Polarization,” in Handbook of Optics, W. G. Driscoll, W. Vaughan, eds. (McGraw-Hill, New York, 1978), Chap. 10.
  8. R. F. Potter, “Analytical determination of optical constants based on the polarized reflectance at a dielectric–conductor interface,” J. Opt. Soc. Am. 54, 904–908 (1964); “Pseudo-Brewster angle technique for determining optical constants,” in Optical Properties of Solids, S. Nudelman, S. S. Mitra, eds. (Plenum, New York, 1969), Chap. 16, pp. 489–513. [CrossRef]
  9. T. E. Darcie, M. S. Whalen, “Determination of optical constants using pseudo-Brewster angle and normal incidence reflectance measurements,” Appl. Opt. 23, 1130–1131 (1984). [CrossRef] [PubMed]
  10. P. C. Logofǎtu, D. Apostol, V. Damian, R. Tumbar, “Ambiguities in determining the optical constants for two reflection methods,” Appl. Opt. 35, 117–119 (1996). [CrossRef]
  11. D. Apostol, P. C. Logofǎtu, V. Damian, A. Dobroiu, “Sensitivity analysis of parameter determination from measurements of directly measurable quantities using the Jacobian,” Opt. Eng. (Bellingham) 35, 1288–1291 (1996). [CrossRef]
  12. K. Lamprecht, W. Papousek, G. Leising, “Problem of ambiguity in the determination of optical constants of thin absorbing films from spectroscopic reflectance and transmittance measurements,” Appl. Opt. 36, 6364–6371 (1997). [CrossRef]
  13. J. Lekner, “Inversion of the s and p reflectances of absorbing media,” J. Opt. Soc. Am. A 14, 1355–1358 (1997). [CrossRef]
  14. P. C. Logofǎtu, D. Apostol, V. Damian, R. Tumbar, “Determination of optical constants of metals by near grazing incidence reflectivity measurements,” Infrared Phys. Technol. 37, 335–341 (1996). [CrossRef]
  15. F. Abelès, “Methods for determining optical parameters of thin films,” in Progress in Optics, E. Wolf, ed. (North-Holland, Amsterdam, 1968), Vol. II, pp. 251–288.
  16. R. M. A. Azzam, “Grazing-incidence differential-reflectance method for explicit determination of the complex dielectric function of an isotropic absorbing medium,” Rev. Sci. Instrum. 54, 853–855 (1983). [CrossRef]
  17. P. Basmaji, V. S. Bagnato, V. Griviskas, G. I. Surdutovich, R. Z. Vitlina, “Determination of porous silicon film parameters by polarized light reflectance measurement,” Thin Solid Films 233, 131–136 (1993). [CrossRef]
  18. G. I. Surdutovich, R. Z. Vitlina, A. V. Ghiner, S. Durrant, V. Baranauskas, “Three polarization reflectometry methods for determination of optical anisotropy,” Appl. Opt. 37, 65–78 (1998). [CrossRef]
  19. O. Hunderi, “New method for accurate determination of optical constants,” Appl. Opt. 11, 1572–1578 (1972). [CrossRef] [PubMed]
  20. R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).

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