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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 16, Iss. 5 — May. 1, 1999
  • pp: 1108–1114

Identity of the cross-reflection coefficients for symmetric surface-relief gratings

Petre C. Logofătu, Stephen A. Coulombe, Babar K. Minhas, and John R. McNeil  »View Author Affiliations


JOSA A, Vol. 16, Issue 5, pp. 1108-1114 (1999)
http://dx.doi.org/10.1364/JOSAA.16.001108


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Abstract

The zeroth-order cross-reflection coefficients of a surface-relief grating are shown to be equal from experimental evidence and numerical evidence by use of rigorous coupled-wave analysis simulations. This result is valid for any range of grating parameters as well as for anisotropic media that have the optic axis in the surface plane. This result is corroborated by effective-medium theory, which models the gratings as thin layers of uniaxial anisotropic media that have the optic axis in the surface plane. For asymmetric grating profiles the zeroth-order reflection coefficients are no longer identical. This property has potential for scatterometry applications.

© 1999 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.5700) Instrumentation, measurement, and metrology : Reflection

Citation
Petre C. Logofătu, Stephen A. Coulombe, Babar K. Minhas, and John R. McNeil, "Identity of the cross-reflection coefficients for symmetric surface-relief gratings," J. Opt. Soc. Am. A 16, 1108-1114 (1999)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-16-5-1108

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