Polarization of light scattered by microrough surfaces and subsurface defects
JOSA A, Vol. 16, Issue 6, pp. 1326-1332 (1999)
http://dx.doi.org/10.1364/JOSAA.16.001326
Acrobat PDF (228 KB)
Abstract
The polarization of light scattered into directions out of the plane of incidence for 532-nm light incident at 45° with p polarization was measured from rough silicon, rough titanium nitride, polished fused silica and glass ceramic, and ground and incompletely polished black glass. Models for polarized light scattering from microroughness, subsurface defects, and facets are reviewed. The measurements demonstrate the validity of the models and the utility of polarized light scattering measurements for distinguishing between roughness and defects.
© 1999 Optical Society of America
[Optical Society of America ]
OCIS Codes
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(240.5770) Optics at surfaces : Roughness
(260.2130) Physical optics : Ellipsometry and polarimetry
(290.5880) Scattering : Scattering, rough surfaces
Citation
Thomas A. Germer and Clara C. Asmail, "Polarization of light scattered by microrough surfaces and subsurface defects," J. Opt. Soc. Am. A 16, 1326-1332 (1999)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-16-6-1326
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Scattering of light from the random interface between two dielectric media with low contrast (JOSAA)
- Light scattering from slightly rough dielectric films (JOSAA)
- Scattering of light from a rough dielectric film on a reflecting substrate: diffuse fringes (JOSAA)
- Polarized light scattering by microroughness and small defects in dielectric layers (JOSAA)
- Simulation of depolarization effect by a rough surface for spectroscopic ellipsometry (JOSAA)
Related Conference Papers
- Large Reciprocal Polarization Rotation in Planar Chiral Metal Nanostructures
- Fast Detection of Single Sided Diffracted Defects in Display Glass
- Light scattering-based measurement of relevant surface roughness
- Analysis of Light Scattering from surface roughness in Hollow-core Photonic Bandgap Fibers
- Interaction of diffuse light with rough dielectric interfaces
« Previous Article | Next Article »
OSA is a member of 