OSA's Digital Library

Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 16, Iss. 6 — Jun. 1, 1999
  • pp: 1326–1332

Polarization of light scattered by microrough surfaces and subsurface defects

Thomas A. Germer and Clara C. Asmail  »View Author Affiliations


JOSA A, Vol. 16, Issue 6, pp. 1326-1332 (1999)
http://dx.doi.org/10.1364/JOSAA.16.001326


View Full Text Article

Enhanced HTML    Acrobat PDF (228 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

The polarization of light scattered into directions out of the plane of incidence for 532-nm light incident at 45° with p polarization was measured from rough silicon, rough titanium nitride, polished fused silica and glass ceramic, and ground and incompletely polished black glass. Models for polarized light scattering from microroughness, subsurface defects, and facets are reviewed. The measurements demonstrate the validity of the models and the utility of polarized light scattering measurements for distinguishing between roughness and defects.

© 1999 Optical Society of America

OCIS Codes
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(240.5770) Optics at surfaces : Roughness
(260.2130) Physical optics : Ellipsometry and polarimetry
(290.5880) Scattering : Scattering, rough surfaces

History
Original Manuscript: November 12, 1998
Revised Manuscript: February 9, 1999
Manuscript Accepted: February 17, 1999
Published: June 1, 1999

Citation
Thomas A. Germer and Clara C. Asmail, "Polarization of light scattered by microrough surfaces and subsurface defects," J. Opt. Soc. Am. A 16, 1326-1332 (1999)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-16-6-1326

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you are accessing the full text through a member bundle, please use the Enhanced HTML link to gain access to the citation lists and other restricted features. Note that accessing both the PDF and HTML versions of an article will count as only one download against your account.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you are accessing the full text through a member bundle, please use the Enhanced HTML link to gain access to the citation lists and other restricted features. Note that accessing both the PDF and HTML versions of an article will count as only one download against your account.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you wish to use one of your free member downloads to view the figures, click "Enhanced HTML" above and access the figures from the article itself or from the navigation tab.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you are accessing the full text through a member bundle, please use the Enhanced HTML link to gain access to the citation lists and other restricted features. Note that accessing both the PDF and HTML versions of an article will count as only one download against your account.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited