The polarization of light scattered into directions out of the plane of incidence for 532-nm light incident at 45° with p polarization was measured from rough silicon, rough titanium nitride, polished fused silica and glass ceramic, and ground and incompletely polished black glass. Models for polarized light scattering from microroughness, subsurface defects, and facets are reviewed. The measurements demonstrate the validity of the models and the utility of polarized light scattering measurements for distinguishing between roughness and defects.
© 1999 Optical Society of America
[Optical Society of America ]
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(240.5770) Optics at surfaces : Roughness
(260.2130) Physical optics : Ellipsometry and polarimetry
(290.5880) Scattering : Scattering, rough surfaces
Thomas A. Germer and Clara C. Asmail, "Polarization of light scattered by microrough surfaces and subsurface defects," J. Opt. Soc. Am. A 16, 1326-1332 (1999)