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Journal of the Optical Society of America A

Journal of the Optical Society of America A


  • Vol. 16, Iss. 6 — Jun. 1, 1999
  • pp: 1477–1483

Characteristics of ion-beam-sputtered high-refractive-index TiO2-SiO2 mixed films

Shiuh Chao, Wen-Hsiang Wang, Min-Yu Hsu, and Liang-Chu Wang  »View Author Affiliations

JOSA A, Vol. 16, Issue 6, pp. 1477-1483 (1999)

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The ion-beam-sputtering method was used to deposit TiO2-SiO2 mixed films on silica substrates. The SiO2 concentration ranged from 0 to 17%, and the refractive index ranged from ∼2.7 to ∼2.3 in visible wavelength. All the structures of the as-deposited films were amorphous. The refractive index and the extinction coefficient decreased with increased SiO2 concentration. High temperature annealing reduced the optical absorption for all films. There was a phase transition from amorphous to polycrystalline anatase at high temperature. Surface roughness, and thus optical scattering, increased drastically with the appearance of the phase transition. The phase transition temperature was higher for films with higher SiO2 concentration. The ion-beam-sputtered TiO2-SiO2 mixed film could sustain higher temperature annealing, resulting in lower extinction coefficient, than that of the ion-beam-sputtered pure TiO2 film. The phase diagram of the mixed film system was given.

© 1999 Optical Society of America

OCIS Codes
(310.3840) Thin films : Materials and process characterization

Original Manuscript: October 9, 1998
Revised Manuscript: January 25, 1999
Manuscript Accepted: January 11, 1999
Published: June 1, 1999

Shiuh Chao, Wen-Hsiang Wang, Min-Yu Hsu, and Liang-Chu Wang, "Characteristics of ion-beam-sputtered high-refractive-index TiO2-SiO2 mixed films," J. Opt. Soc. Am. A 16, 1477-1483 (1999)

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  1. S. Chao, W. L. Lim, J. A. Hammond, “Lock-in growth in a ring laser gyro,” in Physics of Optical Ring Gyros, S. F. Jacobs, J. E. Killpatrick, V. Sanders, M. Sargent, M. O. Scully, J. Simpson, eds., Proc. SPIE487, 50–57 (1984). [CrossRef]
  2. D. T. Wei, “Ion beam interference coating for ultralow optics loss,” Appl. Opt. 28, 2813–2816 (1989). [CrossRef] [PubMed]
  3. J. M. Bennett, E. Pelletier, G. Albrand, J. P. Borgogno, B. Lazarides, C. K. Carniglia, R. A. Schmell, T. H. Allen, T. Tuttle-Hart, K. H. Guenther, A. Saxer, “Comparison of the properties of titanium dioxide films prepared by various techniques,” Appl. Opt. 28, 3303–3317 (1989). [CrossRef] [PubMed]
  4. W.-H. Wang, S. Chao, “Annealing effect on ion beam sputtered titanium dioxide film,” Opt. Lett. 23, 1417–1419 (1998). [CrossRef]
  5. R. Swanepoel, “Determination of the thickness and optical constants of amorphous silicon,” J. Phys. E 16, 1214–1222 (1983). [CrossRef]
  6. S. Chao, C.-K. Chang, J.-S. Chen, “TiO2-SiO2 mixed films prepared by the fast alternating sputter method,” Appl. Opt. 30, 3233–3238 (1991). [CrossRef] [PubMed]
  7. J.-S. Chen, S. Chao, J.-S. Kao, H. Niu, C.-H. Chen, “TiO2-SiO2 mixed films prepared by the double electron beam coevaporation method,” Appl. Opt. 35, 90–96 (1996). [CrossRef] [PubMed]
  8. J. M. Elson, J. P. Rahn, J. M. Bennett, “Relationship of the total integrated scattering from multilayer-coated optics to angle of incidence, polarization, correlation length, and roughness cross-correlation properties,” Appl. Opt. 22, 3207–3219 (1983). [CrossRef] [PubMed]
  9. H. E. Bennett, “Scattering characteristics of optical materials,” Opt. Eng. (Bellingham) 17, 480–488 (1978). [CrossRef]

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