OSA's Digital Library

Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 16, Iss. 6 — Jun. 1, 1999
  • pp: 1477–1483

Characteristics of ion-beam-sputtered high-refractive-index TiO2-SiO2 mixed films

Shiuh Chao, Wen-Hsiang Wang, Min-Yu Hsu, and Liang-Chu Wang  »View Author Affiliations


JOSA A, Vol. 16, Issue 6, pp. 1477-1483 (1999)
http://dx.doi.org/10.1364/JOSAA.16.001477


View Full Text Article

Acrobat PDF (308 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

The ion-beam-sputtering method was used to deposit TiO<sub>2</sub>-SiO<sub>2</sub> mixed films on silica substrates. The SiO<sub>2</sub> concentration ranged from 0 to 17%, and the refractive index ranged from ∼2.7 to ∼2.3 in visible wavelength. All the structures of the as-deposited films were amorphous. The refractive index and the extinction coefficient decreased with increased SiO<sub>2</sub> concentration. High temperature annealing reduced the optical absorption for all films. There was a phase transition from amorphous to polycrystalline anatase at high temperature. Surface roughness, and thus optical scattering, increased drastically with the appearance of the phase transition. The phase transition temperature was higher for films with higher SiO<sub>2</sub> concentration. The ion-beam-sputtered TiO<sub>2</sub>-SiO<sub>2</sub> mixed film could sustain higher temperature annealing, resulting in lower extinction coefficient, than that of the ion-beam-sputtered pure TiO<sub>2</sub> film. The phase diagram of the mixed film system was given.

© 1999 Optical Society of America

OCIS Codes
(310.3840) Thin films : Materials and process characterization

Citation
Shiuh Chao, Wen-Hsiang Wang, Min-Yu Hsu, and Liang-Chu Wang, "Characteristics of ion-beam-sputtered high-refractive-index TiO2-SiO2 mixed films," J. Opt. Soc. Am. A 16, 1477-1483 (1999)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-16-6-1477

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited