Characteristics of ion-beam-sputtered high-refractive-index TiO2-SiO2 mixed films
JOSA A, Vol. 16, Issue 6, pp. 1477-1483 (1999)
http://dx.doi.org/10.1364/JOSAA.16.001477
Acrobat PDF (308 KB)
Abstract
The ion-beam-sputtering method was used to deposit TiO2-SiO2 mixed films on silica substrates. The SiO2 concentration ranged from 0 to 17%, and the refractive index ranged from ∼2.7 to ∼2.3 in visible wavelength. All the structures of the as-deposited films were amorphous. The refractive index and the extinction coefficient decreased with increased SiO2 concentration. High temperature annealing reduced the optical absorption for all films. There was a phase transition from amorphous to polycrystalline anatase at high temperature. Surface roughness, and thus optical scattering, increased drastically with the appearance of the phase transition. The phase transition temperature was higher for films with higher SiO2 concentration. The ion-beam-sputtered TiO2-SiO2 mixed film could sustain higher temperature annealing, resulting in lower extinction coefficient, than that of the ion-beam-sputtered pure TiO2 film. The phase diagram of the mixed film system was given.
© 1999 Optical Society of America
[Optical Society of America ]
OCIS Codes
(310.3840) Thin films : Materials and process characterization
Citation
Shiuh Chao, Wen-Hsiang Wang, Min-Yu Hsu, and Liang-Chu Wang, "Characteristics of ion-beam-sputtered high-refractive-index TiO2-SiO2 mixed films," J. Opt. Soc. Am. A 16, 1477-1483 (1999)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-16-6-1477
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Dual rotating-compensator multichannel ellipsometer: instrument design for real-time Mueller matrix spectroscopy of surfaces and films (JOSAA)
- Reverse proton exchange for buried waveguides in LiNbO3 (JOSAA)
- Improved second-harmonic generation from homomolecular Langmuir Blodgett films of a transparent dye (JOSAB)
- Interferometric detection of ultrafast thermoelastic transients in thin films:theory with supporting experiment (JOSAB)
- Two-dimensional colloidal crystal corrugated waveguides (OL)
Related Conference Papers
- F2 Laser Patterning Indium Tin Oxide (ITO) Thin Film Coating on Glass Substrates
- Femtosecond Laser Ablation of Silicon (100) with Thermal Oxide Thin Films of Varying Thickness
- Femtosecond Laser Ablation of Silicon (100) with Thermal Oxide Thin Films of Varying Thickness
- As-grown low-loss germanosilicate layers by PECVD
- GaInNAsSb/GaNAs VCSELs at 1.46µm
« Previous Article | Next Article »
OSA is a member of 