Analytical determination of the optical constants of a substrate in the presence of a covering layer by use of ellipsometric data
JOSA A, Vol. 16, Issue 6, pp. 1496-1500 (1999)
http://dx.doi.org/10.1364/JOSAA.16.001496
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Abstract
An analytical solution for the determination of the substrate refractive index of a single-layered system from ellipsometric measurements is presented. It is shown that the above ellipsometric inverse problem is reduced to the finding of the roots of a third-degree polynomial. A unique approximate solution in the case of a thin covering layer is also presented.
© 1999 Optical Society of America
[Optical Society of America ]
OCIS Codes
(100.3190) Image processing : Inverse problems
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(160.4760) Materials : Optical properties
Citation
S. C. Russev, M. I. Boyanov, J.-P. Drolet, and R. M. Leblanc, "Analytical determination of the optical constants of a substrate in the presence of a covering layer by use of ellipsometric data," J. Opt. Soc. Am. A 16, 1496-1500 (1999)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-16-6-1496
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