Abstract
An analytical solution for the determination of the substrate refractive index of a single-layered system from ellipsometric measurements is presented. It is shown that the above ellipsometric inverse problem is reduced to the finding of the roots of a third-degree polynomial. A unique approximate solution in the case of a thin covering layer is also presented.
© 1999 Optical Society of America
Full Article | PDF ArticleMore Like This
Jean-Pierre Drolet, Stoyan C. Russev, Maxim I. Boyanov, and Roger M. Leblanc
J. Opt. Soc. Am. A 11(12) 3284-3291 (1994)
Stoyan C. Russev
J. Opt. Soc. Am. A 16(2) 364-370 (1999)
M. Elshazly-Zaghloul and A. R.M. Zaghloul
J. Opt. Soc. Am. A 22(8) 1630-1636 (2005)