An analytical solution for the determination of the substrate refractive index of a single-layered system from ellipsometric measurements is presented. It is shown that the above ellipsometric inverse problem is reduced to the finding of the roots of a third-degree polynomial. A unique approximate solution in the case of a thin covering layer is also presented.
© 1999 Optical Society of America
S. C. Russev, M. I. Boyanov, J.-P. Drolet, and R. M. Leblanc, "Analytical determination of the optical constants of a substrate in the presence of a covering layer by use of ellipsometric data," J. Opt. Soc. Am. A 16, 1496-1500 (1999)