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Journal of the Optical Society of America A

Journal of the Optical Society of America A


  • Vol. 16, Iss. 6 — Jun. 1, 1999
  • pp: 1496–1500

Analytical determination of the optical constants of a substrate in the presence of a covering layer by use of ellipsometric data

S. C. Russev, M. I. Boyanov, J.-P. Drolet, and R. M. Leblanc  »View Author Affiliations

JOSA A, Vol. 16, Issue 6, pp. 1496-1500 (1999)

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An analytical solution for the determination of the substrate refractive index of a single-layered system from ellipsometric measurements is presented. It is shown that the above ellipsometric inverse problem is reduced to the finding of the roots of a third-degree polynomial. A unique approximate solution in the case of a thin covering layer is also presented.

© 1999 Optical Society of America

OCIS Codes
(100.3190) Image processing : Inverse problems
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(160.4760) Materials : Optical properties

Original Manuscript: August 26, 1998
Revised Manuscript: January 19, 1999
Manuscript Accepted: December 8, 1998
Published: June 1, 1999

S. C. Russev, M. I. Boyanov, J.-P. Drolet, and R. M. Leblanc, "Analytical determination of the optical constants of a substrate in the presence of a covering layer by use of ellipsometric data," J. Opt. Soc. Am. A 16, 1496-1500 (1999)

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