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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 16, Iss. 8 — Aug. 1, 1999
  • pp: 1997–2006

Dual rotating-compensator multichannel ellipsometer: instrument design for real-time Mueller matrix spectroscopy of surfaces and films

R. W. Collins and Joohyun Koh  »View Author Affiliations


JOSA A, Vol. 16, Issue 8, pp. 1997-2006 (1999)
http://dx.doi.org/10.1364/JOSAA.16.001997


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Abstract

We describe the design of a high-speed multichannel ellipsometer in the optical configuration PC1r(ω1)SC2r(ω2)A having frequency-coupled rotating compensators (C1r and C2r) and a fixed polarizer and analyzer (P and A) symmetrically placed about the sample (S) on the polarization generation and detection arms of the instrument. For this instrument the frequency-coupled compensators rotate continuously at ω1=5ω and ω2=3ω, where π/ω is the fundamental optical period. Although the dual rotating-compensator configuration has been proposed and demonstrated earlier, we focus on its extension to real-time Mueller matrix spectroscopy of surface modification and thin-film growth utilizing high-speed multichannel detection with a wide spectral range. The proposed instrument design provides the capability of extracting all 16 elements of the unnormalized Mueller matrix of an evolving sample at 1024 points from 1.5 to 6.5 eV with potential acquisition and repetition times of 0.2 s. Techniques of data acquisition, data reduction, and instrument calibration are described for the general case of arbitrary compensator retardances and polarizer and analyzer angles. We expect that the proposed instrument will have important applications in studies of surfaces and thin films that exhibit anisotropy and inhomogeneity.

© 1999 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(120.5410) Instrumentation, measurement, and metrology : Polarimetry
(120.6200) Instrumentation, measurement, and metrology : Spectrometers and spectroscopic instrumentation
(310.0310) Thin films : Thin films
(310.3840) Thin films : Materials and process characterization

History
Original Manuscript: January 6, 1999
Revised Manuscript: March 22, 1999
Manuscript Accepted: March 22, 1999
Published: August 1, 1999

Citation
R. W. Collins and Joohyun Koh, "Dual rotating-compensator multichannel ellipsometer: instrument design for real-time Mueller matrix spectroscopy of surfaces and films," J. Opt. Soc. Am. A 16, 1997-2006 (1999)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-16-8-1997


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References

  1. P. S. Hauge, “Recent developments in instrumentation in ellipsometry,” Surf. Sci. 96, 108–140 (1980). [CrossRef]
  2. R. W. Collins, “Automatic rotating element ellipsometers: calibration, operation, and real-time applications,” Rev. Sci. Instrum. 61, 2029–2062 (1990). [CrossRef]
  3. R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).
  4. G. E. Jellison, “Spectroscopic ellipsometry data analysis: measured versus calculated quantities,” Thin Solid Films 313-314, 33–39 (1998). [CrossRef]
  5. R. M. A. Azzam, “Photopolarimetric measurement of the Mueller matrix by Fourier analysis of a single detected signal,” Opt. Lett. 2, 148–150 (1978). [CrossRef] [PubMed]
  6. P. S. Hauge, “Mueller matrix ellipsometry with imperfect compensators,” J. Opt. Soc. Am. 68, 1519–1528 (1978). [CrossRef]
  7. D. H. Goldstein, “Mueller matrix dual-rotating retarder polarimeter,” Appl. Opt. 31, 6676–6683 (1992). [CrossRef] [PubMed]
  8. R. W. Collins, I. An, H. Fujiwara, J. Lee, Y. Lu, J. Koh, P. I. Rovira, “Advances in multichannel spectroscopic ellipsometry,” Thin Solid Films 313-314, 18–32 (1998). [CrossRef]
  9. J. Lee, P. I. Rovira, I. An, R. W. Collins, “Rotating compensator multichannel ellipsometry: applications for real time Stokes vector spectroscopy of thin film growth,” Rev. Sci. Instrum. 69, 1800–1810 (1998). [CrossRef]
  10. J. A. Zapien, R. W. Collins, R. Messier, “Extensions of multichannel spectroscopic ellipsometry into the ultraviolet for real time characterization of the growth of wide bandgap materials from 1.5 to 6.5 eV,” Mater. Res. Soc. Symp. Proc. (to be published).
  11. J. Opsal, J. Fanton, J. Chen, J. Leng, L. Wei, C. Uhrich, M. Senko, C. Zaiser, D. E. Aspnes, “Broadband spectral operation of a rotating-compensator ellipsometer,” Thin Solid Films 313-314, 58–61 (1998). [CrossRef]
  12. N. V. Nguyen, B. S. Pudliner, I. An, R. W. Collins, “Error correction for calibration and data reduction in rotating polarizer ellipsometry: applications to a novel multichannel ellipsometer,” J. Opt. Soc. Am. A 8, 919–931 (1991). [CrossRef]
  13. Manual for PDA-1024 Spectrometric Detector, Princeton Instruments, Inc., Princeton, N.J., 1998.
  14. Y. Talmi, R. W. Simpson, “Self-scanned photodiode array: a multichannel spectrometric detector,” Appl. Opt. 19, 1401–1414 (1980). [CrossRef] [PubMed]
  15. G. E. Jellison, F. A. Modine, “Two-modulator generalized ellipsometry: experiment and calibration,” Appl. Opt. 36, 8184–8189 (1997). [CrossRef]
  16. G. E. Jellison, F. A. Modine, “Two-modulator generalized ellipsometry: theory,” Appl. Opt. 36, 8190–8198 (1997). [CrossRef]
  17. E. Compain, B. Drevillon, J. Huc, J. Y. Parey, J. E. Bouree, “Complete Mueller matrix measurement with a single high-frequency modulation,” Thin Solid Films 313-314, 47–52 (1998). [CrossRef]
  18. S. A. Henck, W. M. Duncan, L. M. Lowenstein, S. W. Butler, “In situ spectral ellipsometry for real time thickness measurement: etching multilayer stacks,” J. Vac. Sci. Technol. A 11, 1179–1185 (1993). [CrossRef]

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