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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 17, Iss. 5 — May. 1, 2000
  • pp: 920–926

Jones-matrix analysis with Pauli matrices: application to ellipsometry

ShiFang Li  »View Author Affiliations


JOSA A, Vol. 17, Issue 5, pp. 920-926 (2000)
http://dx.doi.org/10.1364/JOSAA.17.000920


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Abstract

The coherency matrix formalism based on Pauli matrices is applied to analyze a general ellipsometer that is described by Jones matrices. Here the Jones matrices are represented as sums of appropriate coefficients times the Pauli matrices and the identity matrix, and intensities are represented as traces of coherency matrices. This approach allows us not only to treat partial polarizations explicitly but also to take advantage of various identities to reduce to algebra the operations necessary for system analysis. A general expression is obtained for the intensity transmitted through a polarizer–sample–compensator–analyzer (PSCA) ellipsometer. This general expression is applied to an ideal PSCA ellipsometer, and then the results are reduced to describe several simpler but commonly used configurations. The results provide insight regarding general capabilities and limitations and allow us to compare different ellipsometer systems directly. Finally, this expression is extended to include artifacts, the explicit representation of which allows a complete determination of their defects.

© 2000 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(260.2110) Physical optics : Electromagnetic optics
(260.2130) Physical optics : Ellipsometry and polarimetry
(260.5430) Physical optics : Polarization

History
Original Manuscript: July 12, 1999
Revised Manuscript: November 15, 1999
Manuscript Accepted: January 13, 2000
Published: May 1, 2000

Citation
ShiFang Li, "Jones-matrix analysis with Pauli matrices: application to ellipsometry," J. Opt. Soc. Am. A 17, 920-926 (2000)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-17-5-920


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References

  1. H. G. Tompkins, W. A. McGahan, Spectroscopic Ellipsometry and Reflectrometry: A User’s Guide (Wiley, New York, 1999).
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  12. D. E. Aspnes, “Optimizing precision of rotating-analyzer ellipsometers,” J. Opt. Soc. Am. 64, 639–646 (1974). [CrossRef]

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