Abstract
Interferometry with laser diodes is a cost-effective way to perform displacement measurement. The tunability of laser diodes is also of great interest in multiple-wavelength interferometry. However, the additional flicker noise in the frequency-noise spectrum of semiconductor lasers may become a limiting factor. Investigations on the limitations due to the noise of laser diodes are presented for both classical and multiple-wavelength interferometry. Measurements at the limit of the coherence length of laser diodes with the corresponding phase fluctuations are reported. The theoretical results are verified experimentally.
© 2000 Optical Society of America
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