A general theory of multilayers with enhanced reflectance has been developed based on the superposition of sub-quarterwave layers of various highly radiation-absorbing materials. The theory has been developed by second-order expansion of the multilayer reflectance with respect to the optical-constant differences between the materials in the multilayer. The current paper completes and improves the theory that was developed in a previous paper [J. Opt. Soc. Am. A 18, 1406 (2001)] by including the case of nonnormal incidence and general radiation polarization and by providing more-accurate film thickness values of the optimized multilayer than with the previous theory. The theory provides an accurate approach to the design of a new concept of multilayer coatings with more than two materials. The new multilayers are adequate to enhance the reflectance of the materials particularly in the far and the extreme ultraviolet.

© 2001 Optical Society of America

[Optical Society of America ]

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