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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 18, Iss. 10 — Oct. 1, 2001
  • pp: 2617–2627

General theory of sub-quarterwave multilayers with highly absorbing materials

Juan I. Larruquert  »View Author Affiliations


JOSA A, Vol. 18, Issue 10, pp. 2617-2627 (2001)
http://dx.doi.org/10.1364/JOSAA.18.002617


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Abstract

A general theory of multilayers with enhanced reflectance has been developed based on the superposition of sub-quarterwave layers of various highly radiation-absorbing materials. The theory has been developed by second-order expansion of the multilayer reflectance with respect to the optical-constant differences between the materials in the multilayer. The current paper completes and improves the theory that was developed in a previous paper [J. Opt. Soc. Am. A 18, 1406 (2001)] by including the case of nonnormal incidence and general radiation polarization and by providing more-accurate film thickness values of the optimized multilayer than with the previous theory. The theory provides an accurate approach to the design of a new concept of multilayer coatings with more than two materials. The new multilayers are adequate to enhance the reflectance of the materials particularly in the far and the extreme ultraviolet.

© 2001 Optical Society of America

OCIS Codes
(120.5700) Instrumentation, measurement, and metrology : Reflection
(230.4170) Optical devices : Multilayers
(240.0310) Optics at surfaces : Thin films
(260.7200) Physical optics : Ultraviolet, extreme
(260.7210) Physical optics : Ultraviolet, vacuum
(310.6860) Thin films : Thin films, optical properties
(350.6090) Other areas of optics : Space optics

History
Original Manuscript: January 25, 2001
Revised Manuscript: March 19, 2001
Manuscript Accepted: March 21, 2001
Published: October 1, 2001

Citation
Juan I. Larruquert, "General theory of sub-quarterwave multilayers with highly absorbing materials," J. Opt. Soc. Am. A 18, 2617-2627 (2001)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-18-10-2617


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References

  1. J. I. Larruquert, “Reflectance enhancement with sub-quarterwave multilayers of highly absorbing materials,” J. Opt. Soc. Am. A 18, 1406–1414 (2001). [CrossRef]
  2. J. I. Larruquert, R. A. M. Keski-Kuha, “Reflectance measurements and optical constants in the extreme ultraviolet for thin films of ion-beam-deposited SiC, Mo, Mg2Si, and InSb, and evaporated Cr,” Appl. Opt. 39, 2772–2781 (2000). [CrossRef]
  3. G. M. Blumenstock, R. A. M. Keski-Kuha, M. L. Ginter, “Extreme ultraviolet optical properties of ion-beam-deposited boron carbide thin films,”in X-Ray and Extreme Ultraviolet Optics, R. B. Hoover, A. B. Walker, eds., Proc. SPIE2515, 558–564 (1995). [CrossRef]
  4. J. I. Larruquert, R. A. M. Keski-Kuha, “Reflectance measurements and optical constants in the extreme ultraviolet of thin films of ion-beam-deposited carbon,” Opt. Commun. 183, 437–443 (2000). [CrossRef]
  5. E. D. Palik, Handbook of Optical Constants of Solids II (Academic, San Diego, Calif., 1998).
  6. J. I. Larruquert, R. A. M. Keski-Kuha (unpublished data).
  7. E. D. Palik, Handbook of Optical Constants of Solids (Academic, San Diego, Calif., 1998).
  8. J. A. Méndez, J. I. Larruquert, J. A. Aznárez, “Preservation of FUV aluminum reflectance by overcoating with C60 films,” Appl. Opt. 39, 149–156 (2000). [CrossRef]

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