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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 18, Iss. 3 — Mar. 1, 2001
  • pp: 565–572

Measuring and modeling optical diffraction from subwavelength features

Xu Wang, Jeffrey Mason, Milton Latta, Timothy C. Strand, David Marx, and Demetri Psaltis  »View Author Affiliations


JOSA A, Vol. 18, Issue 3, pp. 565-572 (2001)
http://dx.doi.org/10.1364/JOSAA.18.000565


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Abstract

We describe a technique for studying scattering from subwavelength features. A simple scatterometer was developed to measure the scattering from the single-submicrometer, subwavelength features generated with a focused ion beam system. A model that can describe diffraction from subwavelength features with arbitrary profiles is also presented and shown to agree quite well with the experimental measurements. The model is used to demonstrate ways in which the aspect ratios of subwavelength ridges and trenches can be obtained from scattering data and how ridges can be distinguished from trenches over a wide range of aspect ratios. We show that some earlier results of studies on distinguishing pits from particles do not extend to low-aspect-ratio features.

© 2001 Optical Society of America

OCIS Codes
(050.1960) Diffraction and gratings : Diffraction theory
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(290.5880) Scattering : Scattering, rough surfaces

History
Original Manuscript: January 5, 2000
Revised Manuscript: August 8, 2000
Manuscript Accepted: August 8, 2000
Published: March 1, 2001

Citation
Xu Wang, Jeffrey Mason, Milton Latta, Timothy C. Strand, David Marx, and Demetri Psaltis, "Measuring and modeling optical diffraction from subwavelength features," J. Opt. Soc. Am. A 18, 565-572 (2001)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-18-3-565

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