OSA's Digital Library

Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 18, Iss. 6 — Jun. 1, 2001
  • pp: 1406–1414

Reflectance enhancement with sub-quarterwave multilayers of highly absorbing materials

Juan I. Larruquert  »View Author Affiliations


JOSA A, Vol. 18, Issue 6, pp. 1406-1414 (2001)
http://dx.doi.org/10.1364/JOSAA.18.001406


View Full Text Article

Enhanced HTML    Acrobat PDF (173 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A new theory of multilayers with enhanced normal reflectance has been developed based on the superposition of a few layers of various different radiation-absorbing materials. Every layer in the multilayer had a sub-quarterwave optical thickness. The theory was developed for materials with small refractive-index differences, although it is also valid in some cases for materials with large refractive-index differences. Reflectance enhancements were obtained in a very broad band and over a wide range of incidence angles. The theory is particularly suited to designing multilayers with enhanced reflectance in the extreme ultraviolet for wavelengths above 50 nm. In this spectral region the reflectance of single layers of all materials is relatively low, and standard multilayers are not possible because of the high absorption of materials.

© 2001 Optical Society of America

OCIS Codes
(120.5700) Instrumentation, measurement, and metrology : Reflection
(230.4170) Optical devices : Multilayers
(240.0310) Optics at surfaces : Thin films
(260.7200) Physical optics : Ultraviolet, extreme
(260.7210) Physical optics : Ultraviolet, vacuum
(350.6090) Other areas of optics : Space optics

History
Original Manuscript: September 18, 2000
Revised Manuscript: November 20, 2000
Manuscript Accepted: December 11, 2000
Published: June 1, 2001

Citation
Juan I. Larruquert, "Reflectance enhancement with sub-quarterwave multilayers of highly absorbing materials," J. Opt. Soc. Am. A 18, 1406-1414 (2001)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-18-6-1406


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. P. Boher, L. Hennet, Ph. Houdy, “Three materials soft X-ray mirrors—theory and application,” in Advanced X-ray/EUV Radiation Sources and Applications, J. P. Knauer, G. K. Shenoy, eds., Proc. SPIE1345, 198–212 (1990). [CrossRef]
  2. J. I. Larruquert, R. A. M. Keski-Kuha, “Multilayer coatings with high reflectance in the EUV spectral region from 50 to 121.6 nm,” Appl. Opt. 38, 1231–1236 (1999). [CrossRef]
  3. J. I. Larruquert, R. A. M. Keski-Kuha, “Reflectance measurements and optical constants in the extreme ultraviolet for thin films of ion-beam-deposited SiC, Mo, Mg2Si, and InSb, and evaporated Cr,” Appl. Opt. 39, 2772–2781 (2000). [CrossRef]
  4. G. M. Blumenstock, R. A. M. Keski-Kuha, M. L. Ginter, “Extreme ultraviolet optical properties of ion-beam-deposited boron carbide thin films,” in X-Ray and Extreme Ultraviolet Optics, R. B. Hoover, A. B. Walker, eds., Proc. SPIE2515, 558–564 (1995). [CrossRef]
  5. J. I. Larruquert, R. A. M. Keski-Kuha, “Reflectance measurements and optical constants in the extreme ultraviolet of thin films of ion-beam-deposited carbon,” Opt. Commun. 183, 437–443 (2000). [CrossRef]
  6. E. D. Palik, Handbook of Optical Constants of Solids II (Academic, San Diego, Calif., 1998).
  7. J. I. Larruquert, R. A. M. Keski-Kuha (unpublished data; see Table I).
  8. E. D. Palik, Handbook of Optical Constants of Solids (Academic, San Diego Calif., 1998).
  9. J. A. Méndez, J. I. Larruquert, J. A. Aznárez, “Preservation of FUV aluminum reflectance by overcoating with C60 films,” Appl. Opt. 39, 149–156 (2000). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 
Fig. 4
 

« Previous Article

OSA is a member of CrossRef.

CrossCheck Deposited